Precision Regulator

0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 -52No.EX-OMS0026CN AD -3276732767 = 15 V 15 V 5000 1000 10001 V 20002 V 30003 V 40004 V 50005 V (5 V-1 V)(5000-1000)1/1000 15 V 1/1000 AD 1000 5000 (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -3276632767 10 5 5 20 20 -3276732766 0 1 0 0 4 /(E.O./W.S.) () E.O.

IR1000/2000/3000

0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 200 400 600 800 1000 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 6 Series IR1000/2000/3000 Series IR3000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

A

ln/min** 1900 ln/min** 1000 ln/min** 1900 ln/min* 400 ln/min* Port Size (IN, OUT) 38 12 38 12 14 EXH Port Size 12 14 38 38 12 INSTALLATION Pilot EXH Port Size 18 The Booster Regulator should be installed with its piston in a horizontal position.

MB1

Without air cushion Foot type/ (L) Bore size (mm) Cushion valve Port LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT (mm) Foot type ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 700 800 1000 1000 1000 1000 9 11 11 14 14 16 22 24 27 27 30 32 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2

MGG

200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Table of Contents

Series VQ0-1000-2000 Plug Lead Unit: Flip Type Body Ported. Specifications. VQ0-1000-2000 F Kit (D-sub connector) . VQ0-1000-2000 P Kit (Flat ribbon cable connector) . VQ0-1000-2000 T Kit (Terminal block) . VQ0-1000-2000 C Kit (Connector) . VQ0-1000-2000 S Kit (Serial transmission unit) . Series VQ1000 Body Ported Plug Lead Unit: Cassette Type. How to Order Manifold.

IR1000/2000/3000

400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) 14-5-11 11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Table of Contents

Lead wire length: 1000 mm ZM-K1LO . 1 pc. VJ10-36-1A-10 . 2 pcs.

Bearing Type: L (Ball bushing bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 10mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: L (Ball bushing bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: L (Ball bushing bearing), Bore Size: 40mm, Port Type: TN (NPT), Stroke: 10mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 10mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 25mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: L (Ball bushing bearing), Bore Size: 63mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 75mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: M (Slide bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bearing Type: M (Slide bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 50mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bore Size: 16mm, Port Thread: M thread: ø12 to ø32, Rc: ø40 to ø100, Stroke: 10mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Bore Size: 25mm, Port Thread: M thread: ø12 to ø32, Rc: ø40 to ø100, Stroke: 50mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)

Piping: G (Centralized Piping Type), Bore Size: 15mm, Port Thread: M Thread: Bore 6-15; Rc: Bore 20-40, Stroke: 200mm, Stopper Type: Bumper Bolt (Resin Tipped), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m)