100

to 24 VDC 12 to 24 VDC FUNC FUNC Blue DC () Blue DC () Output specification A NPN (2 outputs) Output specification B PNP (2 outputs) ZL1 Series ZL3/ZL6 Series Brown DC (+) Brown DC (+) Load Black OUT1 Black OUT1 Load Load Main circuit Main circuit + + White OUT2 White OUT2 12 to 24 VDC 12 to 24 VDC Load FUNC FUNC Blue DC () Blue DC () Output specification C NPN (1 output) + Analog voltage

IIIIIIIIII

Polyurethane TEMPERATURE RANGE 40 150 F (4 66 C) SET-POINT TOLERANCE +/10% of setting OR .5" WC, whichever is greater MAXIMUM OVERPRESSURE Contact Factory DEADBAND Contact Factory CURRENT RATING Contact Factory Wetted materials AT-1004 SET POINT INCHES WC BARB OPTION B85 = 1/8" ID Note: Standard Units supplied with 1/16" barb Ex AT-1004-12 = preset to 12" WC, with 1/16" barb Back to Top .

Speed Controller with

Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective

HRS100/150

A-20/40(60 Hz) 18 18 16 16 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 14 14 Ambient temperature 32C Ambient temperature 40C 12 12 Ambient temperature 40C 10 10 8 8 Ambient temperature 45C Ambient temperature 45C 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-W-20/40(50 Hz) HRS150-W

HRL

14 16 18 Pump Circulating fluid Pump Circulating fluid Circulating fluid flow rate [L/min] head pressure head pressure Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] 1 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Dimensions HRL100-A-40 Ventilation air inlet Ventilation air inlet Ventilation air outlet 40 or less 330 10 954 715 1538 A 1026 4 x 12

Suction Guard (Produced upon receipt of order) FHG Series

HOW 10 (1 1/4B) 12 (1 1/2B) 16 (2B) 45 20 (2 1/2B) 24 (3B) Fixed Note) Refer to page 509 for the T dimension. Replacement Element Part No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

15 13 15 14 17 15 17 Note) Weight (kg) Valve model Body size Function Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440

Electric Actuator Triple Axis P&P Unit

3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 13 Electric Actuator/Maintenance Guide 1 Be sure to read before handling.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Rotary Gripper Series MRHQ

10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting screw attachment ) 6 12 30.4 Max. 14 4-M8 x 1.25 Depth 12 (two on opposite side) 63 24 M5 x 0.8 3-R3 2 4 Finger opening port 17 32 23 27.5 7 11 45 42 69 8 54 2-8.5 through 2-14 depth of counter bore 14 107 Angle adjustment bolt 3-R3 12 3-6H9 depth 8 (one each on three sides) +0.030 0 10 3-6H9 long groove

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

ZP3

Form w 1 Material e r Vacuum inlet Flat Type with Groove C2 Connection thread 04 20 12 1.2 M10 x 1 3 Width across flats 7 06 08 1.8 10 13 16 A12 30 18 M12 x 1 2 Width across flats 14 N S U F GN GS HS Pad diameter: 10 to 16 A10 ZP3 T UM B5 M5 0.8 Width across flats 14 D 5 E E B A Dimensions Per Vacuum Inlet: One-touch Fitting Model A B Fitting part min. hole size Fitting part no.

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

HRX-OM-W032

PV SV 16. Set communication speed (serial communication protocol) with [] key or [] key, and press [SEL] key to enter.

Modular F.R.L. Unit

33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3

CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

3 Port Air Operated Valve Series SYJA300 1

0.64 Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

PSxx-OMV0008CN

18 Line 19 OFF() () -74No.PS-OMV0008CN-E 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -75No.PS-OMV0008CN-E , (1015 ) -76No.PS-OMV0008CN-E ,, (), No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -77No.PS-OMV0008CN-E No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.