An application which could have negative effects on people, property, or animals requiring special safety analysis. 4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a mechanical protective function, and periodical checks to confirm proper operation. 1.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
2 62 3-8H10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 5.8 67 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-M6 x 1 thread depth 20 92 58 (88) 10 10 Stroke + 216 11.5 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.
MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise
Note) The controller unit includes either T-nuts or T-brackets. Note) Pay attention to the shape of the connector on the PC.
4 x 2.6 Depth 7 or less (7.7) 30 20 Power supply/Output connector Bracket A (Part no.: ZS-46-A1) 30 25 20 20 20 45 30 2 30 34.6 19 5.2 5.2 5.2 14.7 47 9.6 Bracket configuration allows for mounting in four orientations.
O e b u t ) h c n i ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M R(PT) 6 1 / 3 8 / 1 S 1 0 5 0 T 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 5 . 2 2 4 2 5 . 6 1 6 2 1 4 / 1 S 2 0 5 0 T 2 Q K 4 1 5 . 6 2 6 2 1 2 8 / 1 S 1 0 7 0 T 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 3 2 6 2 7 1 6 . 4 2 1 4 / 1 4 / 1 S 2 0 7 0 T 2 Q K 4 1 5 . 7 2 8 2 2 2
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port
(Bracket for centralized lead wire) 28 46 14 16 16 20 19 8 (1.6) 5.5 6 12 22 60 48 2 x 3 6.5 2 x 3.4 4 19.2 2 x 5.5 2 20 ISA3 Series Error Indication Main screen Name Description Measures Supply rated pressure (100 kPa to 200 kPa).
T Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T Unit: N.m Cylinder stroke (mm) Bore size (mm) 5 10 100 40 45 50 75 15 20 25 30 35 12 0.11 0.10 0.08 0.07 0.07 0.06 16 0.15 0.12 0.11 0.10 0.09 0.08 20 0.19 0.18 0.17 0.16 0.37 0.32 0.28 0.25 0.23 0.21 25
CJ2 CM2 Symbol A A' B C D E GA GB H J K MM NN Q T CD CH CK CT CU CX CY CZ Bore size (mm) 6 10 15 CG1 6 M10 x 1.0 18.5 7 9 14 16.5 3 10.5 11 17 6 8 M3 x 0.5 20.4 3 16 4 12 1.6 18 3.4 26 MB 6 M12 x 1.0 20.5 10 12 15 20 5 13 17 20 7 8 M4 x 0.7 23.9 5 20 6.5 13.5 1.6 24 4.5 33 6 M14 x 1.0 28 12 14 20 24.5 6 15.5 18.5 24 9 8 M5 x 0.8 31.7 6 25 8 17 2.9 29 5.5 42 MB1 Symbol S Z ZZ R Bore size (
) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port 50 (63) 3 5 38
W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !
The cushion effect (smooth start-up, soft stop) cannot be obtained in an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop considering the above information, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3MPa.
The cushion effect (smooth start-up, soft stop) cannot be obtained in an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop considering the above information, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3MPa.
(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8
(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.