ML1C

Series Stroke Adjustment Unit EA EB EC ED EF EY S T EH EI TT h i Part no.

Micro-Mist Separator with Prefilter Series AMH

Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187

AIR CYLINDER

Install an air dryer, after cooler, etc. Air that includes excessive condensate may cause malfunction of valves and of other pneumatic equipment. To prevent this, install an air dryer, after cooler, etc. 10 - 3 Use the product within the specified range of fluid and ambient temperature.

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are



Can also be used in an intensive piping system.

Wireless System

An application which could have negative effects on people, property, or animals requiring special safety analysis. 4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a mechanical protective function, and periodical checks to confirm proper operation. 1.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

2 62 3-8H10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 5.8 67 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-M6 x 1 thread depth 20 92 58 (88) 10 10 Stroke + 216 11.5 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

Dedicated Controller Series LC1 Uniaxial Type

Note) The controller unit includes either T-nuts or T-brackets. Note) Pay attention to the shape of the connector on the PC.

Digital Flow Switch

4 x 2.6 Depth 7 or less (7.7) 30 20 Power supply/Output connector Bracket A (Part no.: ZS-46-A1) 30 25 20 20 20 45 30 2 30 34.6 19 5.2 5.2 5.2 14.7 47 9.6 Bracket configuration allows for mounting in four orientations.

One-touch Fittings Series KQ2

O e b u t ) h c n i ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M R(PT) 6 1 / 3 8 / 1 S 1 0 5 0 T 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 5 . 2 2 4 2 5 . 6 1 6 2 1 4 / 1 S 2 0 5 0 T 2 Q K 4 1 5 . 6 2 6 2 1 2 8 / 1 S 1 0 7 0 T 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 3 2 6 2 7 1 6 . 4 2 1 4 / 1 4 / 1 S 2 0 7 0 T 2 Q K 4 1 5 . 7 2 8 2 2 2

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Digital Gap Checker

(Bracket for centralized lead wire) 28 46 14 16 16 20 19 8 (1.6) 5.5 6 12 22 60 48 2 x 3 6.5 2 x 3.4 4 19.2 2 x 5.5 2 20 ISA3 Series Error Indication Main screen Name Description Measures Supply rated pressure (100 kPa to 200 kPa).

CQM

T Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T Unit: N.m Cylinder stroke (mm) Bore size (mm) 5 10 100 40 45 50 75 15 20 25 30 35 12 0.11 0.10 0.08 0.07 0.07 0.06 16 0.15 0.12 0.11 0.10 0.09 0.08 20 0.19 0.18 0.17 0.16 0.37 0.32 0.28 0.25 0.23 0.21 25

CJP

CJ2 CM2 Symbol A A' B C D E GA GB H J K MM NN Q T CD CH CK CT CU CX CY CZ Bore size (mm) 6 10 15 CG1 6 M10 x 1.0 18.5 7 9 14 16.5 3 10.5 11 17 6 8 M3 x 0.5 20.4 3 16 4 12 1.6 18 3.4 26 MB 6 M12 x 1.0 20.5 10 12 15 20 5 13 17 20 7 8 M4 x 0.7 23.9 5 20 6.5 13.5 1.6 24 4.5 33 6 M14 x 1.0 28 12 14 20 24.5 6 15.5 18.5 24 9 8 M5 x 0.8 31.7 6 25 8 17 2.9 29 5.5 42 MB1 Symbol S Z ZZ R Bore size (

CJP

seal Rod seal Gasket t y u i o !

10

An auto switch can be mounted at 4 locations.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port 50 (63) 3 5 38

CLA

W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !