CL

601 to 1000 601 to 1000 751 to 1000 751 to 1000 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) FV GA GB GC J H1 K KA M M1 P MM N S W H ZZ e f h ZZ l 59 66 66 80 81 133 133 141 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

High Purity Fluoropolymer

Model M E L M H t W1 W2 K J 1/8 LQ1P11 LQ1P12 LQ1P21 LQ1P22 LQ1P31 LQ1P32 LQ1P33 LQ1P41 LQ1P42 LQ1P51 LQ1P52 LQ1P61 LQ1P62 4 3 6 4 10 8 6 12 10 19 12 25 19 Class 1 11.5 6 11 13 44 10.5 8 10 16.5 15 17 55.5 14.5 8 6 14 15 J Panel thickness (Max. t) 23 21 24 69 20.5 8 7 17 20 W2 W1 M 28 26 28 78.5 24.5 8 7 21 24 1/4 (E) (E) H 39 39 43 100 36.5 9 9 26 29 (L) Class 2 to 5 Panel aperture K 49

New

H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5

0.4

VVQ1000-J-1-A VVQ1000-J-1-B Ejector valve model Nozzle diameter (mm) 0.7 1.0 Max. suction flow rate N (NL/min) 11 20 Note 1) SUP and EXH ports on the ejector unit manifold base are arranged on D-side alone. The end plate on the U-side is the same as that used in the L kit. Note 2) Individual piping is provided for the supply and exhaust ports of the ejector unit.

NCQ8

J M2 bolt circle W M1 E I dia.

MVGQ

ML2B C J G5-S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

127 11 16 13 90 243 80 32 116 269 100 66 137 12 20 16 100 263 100 35 123 286 1/5 stroke 125 77 137 12 20 16 100 267 100 35 123 290 160 94 155 12 24 20 108 297 120 38 131 320 94 Series CHA Dimensions Rear flange type: CHAG V T 2-Rc P 4-J 4-FD Cushion adjustment screw Width across flats G GA 4-J Air release GB MM R (max.)

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

Free Mount Cylinder

JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc1/8 Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5 x 0.8 with depth

HRX-OM-R005

25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060-A-20-(BJM)) 9.5.2 HRS060-W-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid

MG

weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20

ML2B

2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

A G G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69

Compressed Air Preparation Filter

AFF/AM/AMD AMK Modular Connection Example 2 x P (Port size) J M R V1 V2 Q1 C Q21 Q1 AR30-03-D U AFF30-03-D E G Maintenance space *1 Q2 (Sizes 20, 40) Q1 (Size 30) Standard specifications Optional specifications Bracket mount P A C E F G J M Q1 Q2 R S U V1 V2 Size 20 2 1/8, 1/4 83.2 26.5 41.6 25 21 30 24 33 5.5 11.5 3.5 29 38 Size 30 2 1/4, 3/8 110.2 30.5 30 55.1 35 26.5 41 35 7 14 6 42.5

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20