PSE200

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when work piece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when work piece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the work piece for a few times. The optimum values will be set automatically.

5 Port Solenoid Valve, Series VQC

B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM spec. Positive COM spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec.

RQ

Hs A B A B Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A7H D-A80H D-F7 D-A7H, A80H D-A73C, A80C D-F7, F7V D-F79F, J79 D-J79C, F7W D-F7WV, J79W D-F7BAL, F7BAVL D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W D-F7WV Bore size (mm) D-A7, A80 D-A79W D-F7NTL Bore size (mm) D-J79 D-F7W D-F7BAVL Hs Hs Hs Hs Hs Hs 20 A B A B A B A B 25 20 32 25 31.5

E-P HYREG ® Series VY1 1

mA 0 to 20 mA 1 to 5 V 0 to 10 V 4 to 20 mA 0 to 20 mA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting

F/ISE

Our pressure switches do not have an explosion proof rating. Never use it in the presence of an explosive gas as this may cause a serious explosion. Panel Caution Panel mounting adapter A Panel mounting adapter B 1. Do not use in an environment with spattering liquid of oil or solvent. 2.

KJ

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

CG1

-20 Rubber acting 40 Spring extend) C95 CA1 Non-rotating rod Series CG1K 20 to 63 Rubber CS1 Single rod 1.6-26 Double 40 to 63 Air acting 20 to 63 1.6-30 Double rod Rubber Direct mount Series CG1R Rubber 20 Double to 1.6-35 Single rod acting 63 Air Direct mount/Non-rotating rod Series CG1KR 20 Double to Rubber Single rod 1.6-40 acting 63 Low friction Series CG1Q No cushion 20 Double (20 to

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For Safety Instructions and Actuator Precautions, refer to pages 6-20-3 to 6-20-6. Aluminum alloy Hard anodized 125, 140, 160 Tube Carbon steel tube Inside: Hard chrome plated 180, 200, 250, 300 Carbon steel tube Inside: Hard chrome plated Lube NBR JIS B 2401 O-ring Warning Sliding part seal Non-lube NBR PNY, NLP Do not use the cylinder as a shock absorber.

Special Specifications:

Body size Option Specifications Thread type R IN-OUT reversal direction AM, AMG850 Applicable model Port size AM AMG 850 20 Accessory Symbol Description Nil No accessory B Bracket Thread type Option Port size Accessory Symbol Description Nil No accessory B Bracket D N.O. auto-drain J Drain guide 1/4B female thread R T IN-OUT reversal direction Element service indicator 14-20-58 Bowl

IDUS/IDFS

/m3. ( ) Therefore, with an air flow rate of 3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric

PF2D

4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.

High Purity Fluoropolymer

C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) S Bore size 102.5 101.5 45 45 20 20 NB FB 17.5 19 NN Z 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 M5 x 0.8 M4 x 0.7 D GC B F H MM GB GA C A 28 28 NA WW WA WB FC 5.5 5.5 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 29.5 29.5 4 5 M12 x 1.0 691 Air Cylinder CJ2 10-/1121-/22Head Flange (G): CJ2G, CJ2G 10112122Rubber

1.63

to 63 B A Hs 32 to 63 D-P3DWA B A Hs Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-A9V D-P3DWA D-M9V D-M9WV D-M9AV D-A9 D-A9V D-P3DWA Bore size (mm) Bore size (mm) B 11 12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5 9.5 9 12 B 8 8.5 10.5 11.5 15.5 Hs 24.5 26

AZ1000

The following procedures are an example of how a test may be performed. It is intended as an overview and not as an all inclusive description. 1) Rotate the adjustment wheel counterclockwise (DECR) completely to relieve spring force.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

5 Port Air Operated Valve Series SYA3000/5000/7000 1

P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

EX510-GMJ1.eng

COM A COM A is receiving data: Lights up COM A is having no data to receive: Goes off COM B COM B is receiving data: Lights up COM B is having no data to receive: Goes off A. For dual power supply use B.

Vacuum Equipment

Thus, an effective utilization of the vacuum system can be achieved by selecting the proper vacuum equipment. Selection Step 1. Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.