IDX-OM-W017

i-1 . i-1 i-1-1 . i-2 i-2 . i-3 i-2-1 . i-3 i-2-2 . i-4 i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1

IDX-OM-W032

i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDFA Series i-2 i 3 IDX-OM-W032 i i 2 6 WARNING !

IDX-OM-U022

i.1 () 5.2 OFF i.1.1 3 IDFA100F150F i 1 i.1 IDX-OM-U022 i i.2 IDFA100F150F i 2 i.2 IDX-OM-U022 i i.2.1 i.2.2 i.2.3 50 i.2.4 IDFA100F150F i 3 i.2 IDX-OM-U022 i i.2.5 0 i.2.6 WARNING !

Table of Contents

6 e #1 @9 #0 i !0 !3 !1 !2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

IDX-OM-W026

i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W026 i i 2 6 WARNING !

IDX-OM-W014

i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

IDX-OM-W023

i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W023 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W023 i i 2 6 WARNING !

Table of Contents

74 4.5 2.3 35 14.5 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97 25 15 87 17 ZPR25D 25 28 20 35 48.5 63.6 89.5 25 15 79.5 10 Applicable Tubing Applicable Tubing Applicable tubing O.D.

NCA1

E RO D M AT E R I A L 1020 Carbon Steel Medium Duty: Zinc Coated C U S H I O N S An industry proven fully adjustable cushion is a standard P I S TO N RO D option.

Air Cylinder NCA1 Series

E RO D M AT E R I A L 1020 Carbon Steel Medium Duty: Zinc Coated C U S H I O N S An industry proven fully adjustable cushion is a standard P I S TO N RO D option.

IDX-OM-O004C

i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !

IDX-OM-W053

i i 1 () OFF 3 ON OFF i 1 1 3 i 1 i i 2 5 i 2 1 i-2 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-3 i i 2 6 WARNING !

7

Example) VXD2 Z Z 1A X332 3 2 A A Electrical option Seal material: EPDM/ With bracket/ Other option Special electrical entry direction 135 VXD Series Construction Normally Closed (N.C.) i i !2 !2 !0 !0 !1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

Title not found

Wiring Example 2 Parallel I/O Connector: CN5 When you connect a PLC, etc., to the CN5 parallel I/O connector, please use the I/O cable (LEC-CN5-l). The wiring should be changed depending on the type of the parallel I/O (NPN or PNP). Please wire referring to the following diagram.

With Factory Installed

-5~60 'C (Prevent freezing) Construction Relieving type Weight (kg) 0.28 I 0.26 I 0.40 I 0.88 Accessory (Optional) Part No.

Multi-Axis Step Motor Controller

O 1 or I/O 2 parallel I/O connector, use the I/O cable (JXC-C2-m).

Serial Network

How do I address the solenoid valves? The outputs are addressed much the same way as with a parallel I/O card. It depends on configured I/O mapping. Is there a current limit on the outputs? Yes, just as there is a current limit on the I/O card, there is a current limit on the serial unit.

AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.