Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection Supply Valve and Release Valve: K (N.C.
Stations: 03 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 4 (ø1.5), 1st Selection Supply
Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 4
Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: J (Vacuum Break
Stations: 03 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 2 (ø1.0), 1st Selection
Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: BD (with Manifold Options B & D), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle
Stations: 06 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver
Pressure Range: 1 (0.1 MPa), Output Specifications: 0 (NPN, Open Collector Output), Sensor: 1 (External Sensor Type), Mounting: A (Panel Mounting), Protective Cover: B (w/Protective Cover), Made to Order: X2 (Automatic Reset Type)
Special order SMC self-align fittings (Model: “-X2” with electroless nickel plating) or commercially available self-align fittings made of stainless steel should be used. In addition, use an ozone-compatible product.
We recommend stainless steel for metal tubes and fluoropolymer for resin tubes.
However, as deterioration is unavoidable, be sure to replace them regularly.
Note 2) Keep in mind that while standard VQ20/30 series valves have a long service life, the oil-free specification (special order part number suffix “-X2”) has a shorter service life.
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 1, Element: Cotton 100 Micron, Option: -
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 3/4, Element: SUS304 20 Micron NBR, Option: -
Element Size: L250 X2, Housing O-Ring Material: FPM, Port Size: 1, Element: SUS304 105 Micron FPM, Option: Bracket
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 1, Element: Cotton 5 Micron, Option: -
Element Size: L250 X2, Housing O-Ring Material: FPM, Port Size: 1, Element: P.P. 10 Micron, Option: Bracket
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 1, Element: P.P. 20 Micron, Option: -
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 1, Element: P.P. 50 Micron, Option: Bracket
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 1, Element: P.P. 100 Micron, Option: -
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 3/4, Element: None, Option: Bracket
Element Size: L250 X2, Housing O-Ring Material: NBR, Port Size: 1, Element: Cotton 1 Micron, Option: Bracket