MRHQ

point L mm MRHQ25S MRHQ25C 140 Pressure 0.7MPa 80 120 Pressure 0.7MPa 0.6MPa 100 Gripping force N Gripping force N 0.6MPa 60 0.5MPa 80 0.5MPa 0.4MPa 40 60 0.4MPa 0.3MPa 40 0.3MPa 20 0.25MPa 20 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 12-11-9 10 Series MRHQ Rotational Torque and Gripping Point Rotational Torque Graph (3) 3.5 1.0 3.0 0.8 2.5 MRHQ20

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed Series (mm/s) 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-A02 0 1000 900 800 700 600 500 400 300 200 100 0 Courtesy of Steven Engineering, Inc.-230

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

T79 Grommet 2-wire 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V Relay, PLC Heavy-duty cord S7P 3-wire (PNP) For 20, 24 V 30 and 40 R73 100 V Grommet R73C Connector 2-wire R80 48 V, 100 V 100 V or less IC circuit Grommet R80C 24 V or less Connector Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN

MLGP

to 100/MLGPM32 to 100 (Slide bearing) Operating Range as Stopper for MLGPM32 to 100 1000 Weight of transferred object: m (kg) l = 50 mm l = 50 mm 100 m m 80 63 50 40 32 100 5 50 10 20 30 40 50 Transfer speed: (m/min) 9-11-18 18 Compact Guide Cylinder with Lock Series MLGP CL CL1 MLGC CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

MLGP

Bore size 20, 25/MLGPM20/25 (Slide bearing) Operating Range as Stopper for MLGPM20/25 100 25 l = 50 mm l = 50 mm Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore size 32 to 100/MLGPM32 to 100 (Slide bearing) Operating Range as Stopper for MLGPM32 to 100 1000 Weight of transferred object: m (kg) l = 50 mm l = 50 mm 100 m m 80 63 50 40 32 100

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Rear Flange Standard stroke (mm) Without auto switch With auto switch Long stroke (mm) Standard stroke (mm) Bore (mm) L1 L1 B L A B L A Metric Inch Metric Inch 14 15.5 18.5 22.5 12 16 20 25 35 to 100 35 to 100 75 to 200 75 to 300 17 17 19.5 22.5 5 to 30 5 to 30 5 to 50 5 to 50 26 26 32 35.5 3.5 3.5 4.5 5 14 15.5 18.5 22.5 11.5 11.5 12.5 14.5 31 31 42 45.5 22 22 29.5 32.5 3.5 3.5 4.5 5 11.5

ZR

length 0.6 (3.0) m 27 (L) Lead wire length 0.6 (3.0) m D1 D2 50 60 D1 100 VAC ( Hz) 50 60 D2 110 VAC ( Hz) 26 (L) Lead wire length 0.6 (3.0) m D3 67 (L) Lead wire length 0.6 (3.0) m Pilot valve Electrical entry Vacuum switch electrical entry (E) Air operated Nil For 24, 12, 6, 3 VDC Nil DC: 1 W (With indicator light: 1.05 W) AC Nil L Lead wire length 0.6 m Grommet type Lead wire length 3.0

0.01

E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number

Rotary Gripper Series MRHQ

0 20 40 60 80 100 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25S MRHQ25C 140 Pressure 0.7MPa 80 120 Pressure 0.7MPa Gripping force N 0.6MPa Gripping force N 100 0.6MPa 60 0.5MPa 80 0.5MPa 0.4MPa 40 60 0.4MPa 0.3MPa 40 0.3MPa 20 0.25MPa 20 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100120 Gripping point L mm Gripping point L mm 6 Rotary Gripper Series MRHQ Rotational Torque

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Nozzle Type Ionizer

8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Value in the initial state) Solenoid Specifications Base mounted Grommet (G), (H), L Plug Connector (L) M plug connector: (M), DIN terminal (D) M8 Connector (W) Electrical entry JIS Symbol Body ported Base mounted (with sub-plate) DC AC 50/60 Hz 24, 12, 6, 5, 3 100, 110, 200, 220 10% of rated voltage 0.35 {With light: 0.4 (DIN terminal with light: 0.45)} 0.1 (With light only) 1.4 (With light

Air Fittings & Tubing

L M Nylon Urethane M5 X 0.8 Tube O.D.

Thermo-chiller

or less Sulfuric acid ion (SO42) [mg/L] 200 or less Reference item Copper (Cu) [mg/L] 0.1 or less Acid consumption amount (at pH4.8) [mg/L] 100 or less Sulde ion (S2) [mg/L] Should not be detected.

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

Transfer

If there is vibration, impact, etc. at long stroke, we recommend adoption of side support even if it is within the allowable value shown in the graph. (1500) 400 W L Load W ML2B32 ML2B32 W (1200) 300 ML2B25 ML2B25 L L 200 100 0 1000 2000 Support spacing L (mm) 718 ML2B Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) Operating Range (mm) Auto switch

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Poppet) VT 0.56 With light/surge voltage suppressor VP L plug connector (L) (A) 2 VG Body Ported Non-locking push type (Tool required) VQZ200 (Standard) 12 VDC 24 VDC VP 1 (P) 3 (R) L plug connector (L) N.C.

2/3 Port Valve

How to Read The Graph In case of a water flow of 100 l/min.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20