Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

Compact Cylinder Series CQS

x 40L M3 x 45L M5 x 50L M3 x 55L M5 x 35L M3 x 40L M5 x 45L M3 x 50L M5 x 55L M3 x 60L M5 x 65L M3 x 70L M5 x 75L M3 x 80L 6.5 6.5 Mounting bolt Secure the cylinder by using the OA screws that are provided with the cylinder tube.

VZ1000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45

VCC

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

Manifold Specifications

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100 1

V100 SY (L5) Plug assembly 1 2 3 2-4.5 mounting hole (L4) SYJ VVQ100-12A(L3) 88 (8.5) L2 VK 48.7 L1 VZ VT (45) (35) 33 25 (5.5) 23.5 VP 12.3 VG R11 (Min. bending inner radius) Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

x 0.8 (External pilot port) 15.5 15.5 4 Insulation Black () B A 17.5 A B 35 X P EB EA Insulation Red (+) E P 17 4.3 56 17 M5 x 0.8 (Pilot EXH. port) 65 62.5 109.1 66.5 (For E type) L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 5 x 1/4" (Piping ports) 28 L plug connector with cover (LL) 52-SY5140 (R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation

Power Valve Precision Regulator

Description Part no. 9 VBA1-10 Knob 847 VEX13 Series 0 3 Body Ported VEX1A33-M5, 01 A section view 2 x M3 thread depth 6.5 (For bracket and foot mounting) 4 x 4.5 (Mounting hole) Pressure gauge (Option) M5 3 x , M5 1 8 Note) 76 Foot (Option) Note) Bracket (Option) (Mounting hole) 2 x 4.5 Note) ( ) are the dimensions of M5.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

Electric Actuators

3 e u !

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

bolt B at ot ot (For clockwise rotation end adjustment) 5 5 r r 9 se 9 e e is e wi g w g n n k k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m

MQQ

MQQTB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

B='=(ij ~~2 ('O-m E -=-'0 ~!!! "":'0 'v' L-4-L-,j-i) . ., :2 ~ Interface ~ ~ i!i regulator .:;,.~ E ... ~ .. SUP gallery block disc: AXT634-10A EXH gallery block disc: AXT634-11A Cb"''lC ~~E i~ ~ L . .

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43