VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

VZ1000

Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted, single operating VZS How to Order Manifold

VQ5000

27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

E-MY2_E_D

Voltage without load (V peak) Max. current rating (A) 0 to 20[V] 5.0 Over 20[V] up to 30[V] 100/peak voltage 2. Circuit (of class 2) which is of 30Vrms (42.4V peak) or less with the power supply unit of class 2 complying with UL1310 or transducer of class 2 complying with UL1585. NOTE Follow the instructions given below when handling your actuator.

Platform Cylinder Series CXT

Operating pressure P (MPa) P 0.7 MPa 4. Speed V (mm/s) V 500 mm/s Guideline for Selection of Bearing Type Bearing type Required conditions Impact load and vibration load are added. Change in load is large. Long life span is required. Slide bearing Selection of bearing type High accuracy (Little rattle is allowed.)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

No 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire 3-wire (NPN equivalent) IC circuit A96V A96 5 V Grommet A93V A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V 24 V 100 V or less Solid state auto switches marked with are produced upon receipt of order.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

: M5 x 0.8 0XY: M6 x 1.0 771

Vacuum gripper

Depending on the piping volume (piping length and diameter), if the pressure just before the supply (P) port falls below 0.5MPa, the performance such as vacuum pressure may reduce. Raise the upstream pressure,and the pressure just The pressure just before the supply (P) port is low. before the supply (P) port becomes 0.5MPa.

IDX-OM-W028

MOV Motor Operated Valve TDR PRS2 THR PRR TDR Time Delay Relay P For Option M 11-6 Electric circuit 11 4 IDU Series IDX-OM-W028 Air Dryer 12 Specification for Option V 12 Specification for Option V This product mounts the timer operated auto drain in Item 2 Specifications.

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

3 Port Solenoid Valve Series VQ100 1

16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8

3 Port Solenoid Valve Series VQ100

V100 SY (L5) Plug assembly 1 2 3 2-4.5 mounting hole (L4) SYJ VVQ100-12A(L3) 88 (8.5) L2 VK 48.7 L1 VZ VT (45) (35) 33 25 (5.5) 23.5 VP 12.3 VG R11 (Min. bending inner radius) Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum

3 Port Solenoid Valve Series VQ100 1

V100 SY (L5) Plug assembly 1 2 3 2-4.5 mounting hole (L4) SYJ VVQ100-12A(L3) 88 (8.5) L2 VK 48.7 L1 VZ VT (45) (35) 33 25 (5.5) 23.5 VP 12.3 VG R11 (Min. bending inner radius) Manual override 21.5 (29.3) VP 104 S070 VQ VKF Stations12345n D side U side VQZ 2-M5 x 0.8 (E port) VZ 2-M5 x 0.8 (P port) VS 43.5 A A VFN 20 (8.5) 1.5 5 (7.5) n-M5 x 0.8 (A port) 5 15 P = 10 38 n: Stations (Maximum

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Vacuum Gripper

[m/s2] Note3) 150 / 30 Air supply port(P) One touch fitting (6) Internal Power supply voltage [V] 24 VDC 10% Max. vacuum pressure [kPa] note4) -84 Suction flow rate [L/min(ANR)] note4) 17 Vacuum ejector Air consumption [L/min(ANR)] note4) 57 Supply pressure range [MPa] 0.3 to 0.55 Standard supply pressure [MPa] note5) 0.5 Valve Model V114 Model ZSE20---M5-A1 Rated pressure range [kPa] 0

Refrigerated Thermo-chiller

T Temperature fuse P. 196 Thermal relay P. 198 Thermistor P. 196 Thermo couple P. 196 Thermoelectric device P. 193 Thermoelectric system P. 193 Thermo-module P. 193 Thermostat P. 196 Three-phase power supply P. 198 Time division proportional output P. 197 Turbine pump P. 194 U UL standards P. 199 V Vane pump P. 194 Vortex pump P. 194 W Water control valve P. 193 Water-cooled condenser P.