LEC-OM07605CN

PA_ _ ]) [] PA01 **STY _ _ _ x 0h _ _ x _ 0: (0) 0h _ x _ _ 0h x _ _ _ MR-J4(W)-B [AL.3E ]8 0: J3 (LECSS-) 1: J4 (LECSS2-T) 1h 5 12 5. [] PA02 **REG [AL.37] _ _ x x 00: 00h 100W 200W750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 _ x _ _ 0h x _ _ _ 0h 5 13 5. [] PA03 *ABS _ _ _ x 0: () 1:() 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h PA04 *AOP1 A-1 _ _ _ x 0h _ _ x _ 0h _ x _ _ 0(EM2EM1) 1(

Electric Actuator with Integrated Guide

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting

CQS

l X 60 l X 65 l X 70 l X 75 l X 80 l M5 X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l 6.5 6.5 CDQSKB165D 10D 15D 20D 25D 30D 6.5 6.5 CDQSKB205D 10D 15D 20D 25D 30D 35D 40D 45D 50D 6.5 6.5 CDQSKB255D 10D 15D 20D 25D 30D 35D 40D 45D 50D 8.5 8.5 Note) The appropriate plain waher must be used for through-hole. 2.2-27 Series CQSK Dimensions/12 to 25 *Refer to P.2.2-38

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Thermo-con/Rack Mount Type

Circulating device Users equipment L 0.8 x 3 x 1 x 103 x 4.2 x 103 = T = T2 T1 60 x 1000 = 167 W T1: Outlet temperature 200 W Cooling capacity = Considering a safety factor of 20%, 167 W x 1.2 = Example 3 When cooling the object below a certain temperature in certain period of time.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 2 44 36 37.4 60 M8 x 1.25 16 80 146 4 32.2 60 205 to 500 227.6 190.2 505 to 800 262.6 225.2 LAT LZ Body Bottom Tapped [mm] Size Stroke range [mm] Without lock With lock F G W X Z W X Z Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 25 15 to 100 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

5 Port Air Operated Valve

) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (

MNB

55 70 80 100 120 K 6 6 7 7 10 10 MM N 27 27 31.5 31.5 38 38 LD 7 9 9 12 12 14 P 1/8 1/4 1/4 3/8 3/8 1/2 Bore size (mm) 32 40 50 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 57 64.5 77.5 93 106 123 Rod side flange style (F): MNBWF Rc 1/8 BC element Rc P Rod side cylinder port GA GC GD Rc BP unlocking port W GR GL GL1 Rc P Head side cylinder port GE B B2 H A S + Stroke

MNB

55 70 80 100 120 K 6 6 7 7 10 10 MM N 27 27 31.5 31.5 38 38 LD 7 9 9 12 12 14 P 1/8 1/4 1/4 3/8 3/8 1/2 Bore size (mm) 32 40 50 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 57 64.5 77.5 93 106 123 Rod side flange style (F): MNBWF Rc 1/8 BC element Rc P Rod side cylinder port GA GC GD Rc BP unlocking port W GR GL GL1 Rc P Head side cylinder port GE B B2 H A S + Stroke

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

CL

Without rod boot With rod boot Bore size (mm) M MM N S W P H ZZ e f h ZZ l 51 58 58 71 72 110 110 120 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 40 50 63 80 100 125 140 160 11 11 14 17 17 27 27 30.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 215 237 254 296 315 376.5 385 423.5

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

Tie-rod Type Hydraulic Cylinder

Rc P 4 x J 4 x FD CHQ Width across flats G GA 4 x J Air release GB Cushion adjustment screw CHK MM R (max.)

High Purity Fluoropolymer

Symbol 2 2 2 3 3 4 4 5 5 Applicable tubing size (inch) No. 2 2 3 3 3 4 4 5 5 Class Symbol E T P U Type Union elbow Union tee Panel mount union Union 1 2 1 2 3 1 2 1 2 A B C A B A B A B 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" Class Size combination Applicable tubing size (mm) 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

VQ5000

PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds VV5Q 5 1 08 K 03 F U1 Option Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner

Stopper Cylinder

7.5 43.5 61 17.5 E W 4 x M4 x 0.7 effective depth 7 Y Q F 2 x M4 x 0.7 effective depth 7 15.5 0.5 Mounting bolt for rod cover 2 parts 15.5 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke 25 Y E W Q F T 0 0.1 D 2 x N through 4 x O counterbore E 2 x P (Rc, NPT, M thread) Stroke RSQB -DZ (Double acting) Bore size: 16, 20 16 20 Y Q F A + 2 stroke B + Stroke V H + Stroke Width

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8