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3 e w !6 r !9 Note) With top cover removed !

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5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

R.

0.4

e q w VQC1100 VQC1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (

0.4

SQ2000 Plug-in Type Main Parts and Pilot Valve Assembly Plug Lead Metal seal type Rubber seal type SQ 1000 Single: SQ2130 Single: SQ2131 SQ 2000 r e q w r e q w EX510 SQ2130 SQ2131 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) F kit Double: SQ2231D Double: SQ2230D r e q w r w e q P SQ2230D SQ2231D 2 (B) (A) 4 2 (B) (A) 4 kit (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) J kit

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u w t e r !

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Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

&snac

D o n o t m e r g e p u r s i n s a i r t i n e p i p i n s o n F t u c t d e w o o i n t c h e c k e r a \ v a t e r f l o w i n t o m e m b r a n e a i r d r Y e r . a l G r a i n s i n d e w p o i n t c h e c k e r a r e c r u s h e d . I : W h e nd e w p o i n t c h e c k e r i s a i t a c h e d S t a n d a r d e w p o i n !

Table of Contents

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

NCQ2/CQ2

x 160L 6.5 7.5 10 -100DC-R -100DC-R C BQ2B50-10DC-R C BQ2B25-10DC-R 80 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 8.5 12.5 7 -100DC-R -100DC-R C BQ2B63-10DC-R C BQ2B32-10DC-R 85 90 95 -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R -15DC-R -20DC-R -25DC-R -50DC-R -75DC-R 9 14.5 -100DC-R -100DC-R C BQ2B80-25DC-R 15 -50DC-R C BQ2B100-25DC-R 15.5 -50DC-R

Metal Seal/Rubber Seal Series VQ Body Ported

Description Zinc die-casted Zinc die-casted Body Body w w Stainless steel Aluminum/HNBR Spool/Sleeve Spool valve e e Resin Resin Piston Piston r Pilot valve assembly r Pilot valve assembly Note) L M G 2 Note) L M G 2 VQ111(H) (Y) Voltage 1 to 6 VQ111(H) (Y) Voltage 1 to 6 Single Single VQ110L L M 2 VQ110L L M 2 Double (Latching) Double (Latching) Voltage 1 to 6 Voltage 1 to 6 Note) L M G

Electric Actuators

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

How to OrderValves (With two mounting screws) SY 3 5 C6 1 0 3 1 q w r e t y u i o !0 !1 !2 !3 Top ported !

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Made to Order

(for std model) w-1 From P. 1188 w-1 From P. 1208 MY1B-Z Linear guide type MY1H-Z Basic type MY1B With cover (W) is also available. MY1M (W) Slide bearing type w-1 From P. 1238 With cover (W) is also available.

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard