Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

CEx-OMQ0013

NO YES NO YES YES NO NO NO YES P.10 9 YES YES NO 1? 14.5 ?

Electro-Pneumatic Proportional Valve Series VEF/VEP

(MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 0.1 to 0.9MPa 2 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

CE2

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

CE2

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

LG1H

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

HRX-OM-W058

The weight will increase by 6kg when option T [High pressure pump] is selected. *12 In case option T [High pressure pump] selected. *13 In case option T [High pressure pump] selected, this fitting is not enclosed as accessory. *14 In case option J [Automatic fluid filling] selected.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

Electric Actuator with Integrated Guide

Output reversal command O-NOT General purpose input no., State AND input wait command I-AND General purpose input no., State Input wait 90 OR input wait command I-OR General purpose input no., State AND input time out jump command T-AND Mounting with T-brackets (P-no.) label General purpose input no., State OR input time out jump command Input wait with time out function T-OR (P-no.) label

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Shock Absorbers and Rate Controls

P!.l llunbcr llodel (Rell B C .05 t) t t G Eolt Slts w?isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

HRX-OM-W060

P.5-12 (15) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (16) Operation mode P.5-12 Common or serial communication ( mode). (17) Operating condition display It indicates the run and stop status of the product. P.5-12 (18) Run/Stop To run/stop the product.

VQ4000

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.