30 +1 1 +1 1 +6.4 +6.4 +20 +4.9 +20 +4.9 50 50 +25 +25 +51.4 +51.4 +40 +49.9 +40 + 9.9 13-11-110 15 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer/Female Thread Series ZPR How to Order ZX ZPR 10 F GS 06 B5 ZR ZM Pad diameter (mm) Mounting thread diameter/ Female thread (Refer to Table (1) for applications.)
12 12 1 A S D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12mm 20mm 12 2 pcs. 1 pc.
9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1
9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1
1/4 37 114 11 7.5 8 66 246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16
Description Material Qty Note 18 19 20 21 22 23 24 25 26 27 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet holder Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR
Low Speed Cylinder Double Acting, Single Rod Series CQSX 12, 16, 20, 25 How to Order CQSX D B 20 30 Without auto switch 30 F9BW B 20 CDQSX D With auto switch Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.
Bore size (mm) Standard stroke (mm) Action D Double acting 5, 10, 15, 20, 25, 30 12, 16 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.
/4 2500 3000 12.5 15 30 6 10 1/4, 3/8 = 0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1/4, 3/8 3/8 3/8 3/8 1500 2000 2500 3000 12 16 20 24 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 40 8 10 1/4, 3/8 500 6 40 = 0.7 30 40 3/8, 12 3/8, 12 3/8, 12 3/8, 12 3/8, 12 1000 1500 2000 2500 3000 12 18 24 30 36 0.5 0.1 0.3 20 10 Note) Refer to page 10-6-7 for maximum absorbed energy since cushioning
1 0 11 0 12 0 1) 2) (CW ) ((CCW ) 1) () (CCW ) 1mm () 2) (=) mm()1mm a)0 1 (LEHZ(J),LEHF ) (LEHS 0) 7 - =30 ) ()Amm b)30 31 =30 1) ()Amm 2) CW () (CW )30 29 30 1 29 8 - (LEC ) (LEC ) () 2:CCW 1:CW () 2:CCW () 1) 1 100 40 100 / LEHZ(J),LEHF,LEHS 50 100 / LEHZJ10L,LEHZJ16L 2) 100 5 50 LEHZ(J) , LEHS 5 20 LEHF10 5 30 LEHF203240 3) 10 2,000 10 0: 0 21 0 1) P.53 8.3
x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 200 Up to 300 Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300
Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.
X 0.8 (Thread for mounting attachment) 30 21 45 MHW2-25D.SMHW2, #2 MHW2-25D1.SMHW2, #6 2.8-20 180 Angular Gripper Series MHW2 MHW2-32D Flat finger (Standard) 24 2-M6 X 1 Depth 10 (Mounting thread) 21 61.5 83.5 4-M6 X 1 Depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 2-M6 X 1 Depth 12 (Mounting thread) 47 29 42 58 45 30 MHZ2 MHZJ2 32 MHQ 9 +0.2 +0.1 23 2 MHL2 34H9 +
MI W S 100 200 50 CEP1 130 50 100 50 40 40 CE1 40 Weight of transferred object m (kg) Weight of transferred object m (kg) 32 30 40 50 CE2 20 30 32 20 ML2B 20 16 10 C J G5-S 10 12 5 4 CV 3 4 5 3 MVGQ 2 2 CC 1 1 RB 1 5 10 20 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) J Lateral Load and Operating Pressure DThe larger the lateral load, the higher the operating pressure required
33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 (SUS) 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5
31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Read Data1 Byte Count Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-R028 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read
31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS090 Series 4.5 Message configuration 4-9 HRX-OM-T004 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read