Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40 (Refer to page 19.) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less 400 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less 1600 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less 4000 cm3/min or less Supply pressure 0.5 MPa Note 1) Value when horizontal
Rotating Torque/Permissible Number of Rotations Applicable tube O.D. 5/32/4 1/4/6 5/16/8 3/8/10 12 Rotating torque in-lbf (Nm)NOTE 1) 0.053 0.106 0.124 0.177 0.195 (0.006) (0.012) (0.014) (0.020) (0.022) Permissible number Series KS 500 500 400 300 250 of rotations Series KX 1500 1200 1200 1000 1000 Note) Value under pressure 73psi (0.5MPa).
Controller JXC2 Main control power supply 24 VDC 120.3 120.3 mm mm 200 200 mm/s mm/s To USB Port To USB connector 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 or To CPWR connector USB Cable PC JXC3 -3- 3. Connection Check Connect the USB cable, and supply power to the controller.
pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less How to Order Port Number q w e r AP10 S
300 1000 3300 5700 8600 12000 18000 150 700 2500 5000 7000 10500 14000 2100 4300 5600 8000 11000 AM Misc.
500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min 858 Clean Regulator SRH Series Pressure Characteristics
consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.
(16 outputs) S-Link (8 outputs) T Link Mini DeviceNet CompoBus/S (16 outputs) CompoBus/S (8 outputs) JEMANET J1 J2 K Q R1 R2 U V CC-Link SS5Y3-45SA-05U-C6. 1 set (Type 45S, 5 station manifold base with serial unit part no.)
The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.
13 5.5 19.5 8 M10 X 1.25 45 15 34.5 32 M26 X 1.5 26 22 41 8 10 14 46.5 24 16 7 21 11 M14 X 1.5 50 21.5 42.5 40 M32 X 2 32 Dimensions by stroke Boss-cut style (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ S ZZ S ZZ ZZ ZZ ZZ ZZ ZZ Bore Bore 87 141 112 166 137 191 20 20 128 153 178
(1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20-20D Average speed 0.85mm/s Average speed 0.88mm/s 2.0 Average speed 0.43mm/s Average speed 0.43mm/s 2.0 Speed waveform Speed mm/s Displacement mm Speed waveform Speed mm/s Displacement mm 0 0 Operating direction in Operating direction out Operating direction in Operating direction out 2.0 -2.0 60 40 Displacement
CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing
CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing
S Kit can be used by connecting to gateway unit.
S Kit can be used by connecting to gateway unit.
MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S
30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.
"S" option is not available.