JA/JAH/JB/JS

31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5

JA/JAH/JB/JS

2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 8 9 9 13 13 13 15 15 18 24 24 24 42 J D-X 20Data For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-5 6 Series JA Foot Style: JAL20 to JAF160 JAL20 to

C95

] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) r w w q t r e y q t A A B B SY SYJ i i SX R1 P R2 R1 P R2 VK 3 position closed center/exhaust center/pressure center u VZ 3 position closed center (A) 4 (B) 2 VF t q r w 5 (R1) 3 (R2) 1 (P) VFR 3 position exhaust center (A) 4 (B) 2 A B VP7 5 (R1) 3 (R2) 1 (P) VP4

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

[660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Inertial load: Ta 20Inertial load Effective torque Ts . 10 x Ta = 10 x x Effective torque (3 to 5) Tf Effective torque 10 Ta = 10 x 0.00109 x (2 x ( / 2) / 0.32) Load types = 0.380 Nm Effective torque OK Effective torque Note) I substitutes for t the value for inertial moment.

Basic Type/Direct Mount Type

2 !6 t !0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

MVGQ

Note 2) For the electrical entry except the grommet type, refer to page 10-16-4.

MHZ

M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 12-2-59 59 Parallel Style Air Gripper Long Stroke Type Series MHZL2 Size: 10, 16, 20, 25 How

MHZ

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA RE A B Both Ends Tapped (mm) Bore size (mm) O1 R O1 thread REC R R 32 M6 x 1.0 10 40 M6 x 1.0 10 CX 50 M8 x 1.25 14 CY MQQ M RHC H thread effective depth C U 4-N through 8-O counterbore Q F 2-P (Port size) (Rc, NPT, G) MK(2) I RS Q G RS H A 22 D M E Z 11 Lead wire min. bending radius 10 RZQ Auto switch D-A7, A8 MI W S

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

RSH/RS1H

8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !

Pulse Valve

IN side IN side IN side 12 ATEX Compliant Pulse Valve Valve for Dust Collector 55-JSXFA Series RoHS II 2 G Ex h IIB T6 Gb II 2 D Ex h IIIB T72C Db 40C Ta +60C How to Order JSXFA B 06 R E 1 55 Compression fitting type Direct piping type e r t y w q w IN/OUT port size ATEX category 2 q Piping e Thread type E Compression fitting type1 F Direct piping type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (