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(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8-2-DFHG FIG FJG VSR8-2-FG-DVSR8-2-FG-SVSS8-2-DFHG FIG FJG VSS8-2-FG-DVSS8-2-FG-SDescription No.

Stroke range: 2001 to 3000mm MY1 M W XB11 MY1 M W XC67 Bore size Stroke Auto switch type No. of auto switches Bore size Stroke Auto switch type No. of auto switches Series: Bore size Series: Bore size 10 16 20 25 32 40 50 63 80 100 10 16 20 25 32 40 50 63 80 100 Slide bearing guide type Slide bearing guide type M C M C Cam follower guide type Cam follower guide type Contact SMC for marked

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

q w q w q SL5802S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 V3 V3 MPA MPA 2PW 3PW 4PW 1 1) Other range available.

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

g] Stations: n W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VFA5000).

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

(Standard), 2.3 W (Low wattage) 4 W (Standard), 2 W (Low wattage) Power consumption (DC) W/o indicator light W/ indicator light AC DC AC DC Surge voltage suppressor JIS Symbol Body ported Base mounted Neon bulb LED Indicator light At the rated voltage Mounting with VK300 Flow Characteristics/Weight Series VK300 can be mounted on the same manifold base VV5K3 of VK3000 series.

A l l o w a b l e L o w e r 7. Allowable Lower Temp. Range Setting range : 0.1 to 10.0 C Min. increment : 0.1 C Indicated content : Temp. from target to lower limit T e m p . R a n g e M O D E < 1 . 5 C (Ex. : 1.5 C) Function : Sets lower limit of temp. where the warning arises. The difference between target temp. and lower limit temp. should be input.

e Drain cock with barb fitting: 6 x 4 nylon tube W AC25 to 60 q w Note 3) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) q w Z AC10 to 60 w q e When more than one specification is required, indicate in ascending alphanumeric order.

1 o w !0 !1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

) 4 W (Standard), 2 W (Low wattage) Power consumption (DC) W/o indicator light W/ indicator light AC DC AC DC Body ported Surge voltage suppressor Neon bulb LED Symbol Body ported Base mounted Indicator light At the rated voltage (B) 2 (A) 4 (B) 2 (A) 4 Flow Rate Characteristics/Weight 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R) Flow rate characteristics Operating pressure range (MPa) Weight (g) 4/2

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

(Use an auto switch rated 24V DC, with a minimum amperage capacity of 10mA.) q q q w w w e e e r (Unit: N) Bore size (mm) 40 50 63 80 100 Operation r Min. sensing weight 26 40 62 100 160 Warning Back-up of the balance pressure data The balance pressure data is backed up by the controller for approximately 5 minutes during a power outage or when the power supply has been turned OFF.