Electric Actuator / Slider Type 《 AC Servo Motor 》

90 or less (No condensation) Motor output [W] / size [mm] 100/40 200/60 400/60 specificatio Type of Motor AC servo motor (100/200VAC) Electric [Type of Motor: S2,S3,S4] Incremental 17bit encoder (Resolution: 131072 p/rev) n [Type of Motor: S6,S7,S8] Absolute 18bit encoder (Resolution: 262144 p/rev) Encoder [Type of Motor: T6,T7,T8] [With LECSB-T/LECSS-T] Absolute 22bit encoder (Resolution

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

IDX-OM-O004C

MOV P MOV CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB MOV 11 2 12.R R 12 12.1 12.2 1 AC100V AC200V INOUT IDF15E1-10-R IDF15E1-20-R (A) 10 (mA) 30 12.3 M5 9.5mm 1.25mm 2 L ,N N L () () 12 1 12.R AC100V M4 () AC200V (M3) 12.4 () () ONOFF 12 2 12.R 12.5 IDF15E1-10-R IDF15E1-20-R N L N L GFCI GFCI PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 C11 FM FM PRS PRS

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

IDX-OM-U021

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

XL-OMY0002

R Chemraz VALQUA.CO.JP R ULTIC ARMOR 25 40 50 63 80 100 160 H4100 XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 (2 ) (3 H5120 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

IDX-OM-W014

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

Microspeed Cylinder

Vertical actuation I II P W A P a (b) (a) P P a A W (1) Basically adjusted with meter-out control. When meter-in control is also used, lurching is reduced. (1) Basically adjusted with meter-out control.

IDX-OM-W017

OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E/8E IDFA6E/8EFM2 IDFA15E1 N L C R GFCI For Option R CM FM1 FM2 N L PE OLR TB PTC PTC ILS ILS PRS TB PE EDV C02 For Option V C11 OLR PTC GFCI EDV PE CM C01 C11 PE FM PRS P 6-4 IDFA Series 6 4 IDX-OM-W017 6 6-5 IDFA3E IDFA4E15E1 2 6-5 IDFA Series 6 5 IDX-OM-W017 7 A A 7 1 7 2 A 7 3 7 4 IDFA3E IDFA4E

ZSE F/ISE

100 kPa Operating pressure range and regulating pressure range Proof pressure 100 to 100 kPa 500 kPa 0.1 0.100 to 1.000 MPa 1.5 MPa kPa MPa kgf/cm2 s 0.001 0.01 0.01 0.1 0.001 0.001 0.02 1 0.1 Note 1) Setting/Display resolution ZSE ISE bar psi mmHg inHg PSE Z I SE3 Fluid that will not corrode stainless steel 630 and 304 12 to 24 VDC, Ripple (p-p) 10%or less 55 mA or less (With no load

Series AS-FM/AS-M/ASD-FM

Speed Controller for Low Speed Operation Speed controller with One-touch fitting (resin body) Connecting tube Page Port threads AS-FM Elbow type R Metric size P.1 New New NPT Inch size Universal type R Metric size P.1 New New NPT Inch size In-line type New New Metric size Inch size P.9 Speed controller (metal body) Cylinder side Tube side AS-M R R Elbow type P.7 NPT NPT Dual speed controller

EXxx-OMZ0016

Connection status of the NFC reader/writer When the PC detects the NFC reader/writer connected to its USB port, "R/W detected" is displayed. Otherwise, "R/W not-detected" is displayed.

CEx-OMQ0010

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES

CLK1

P-80 (YG)

IDX-OM-W032

Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 6 2 IDX-OM-W032 6 6-4 IDFA22E, 37E GFCI R GFGI For Option R L N PE TB ILS V For Option V EVD EDV CM OLR PE C01 C11 PE FM PRS P IDFA55E, 75E GFCI R L N PE CM FM () MC C01 CM C11 FM1 PRS PRS1

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

100 D-A3lC D-G39C D-K39C Different surfaces 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10