Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

SZ3000

Stations Stations Scale: 37% [With external pilot] 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 R 3 B 2 PE X A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 P 1 A 4 2-One-touch fitting 2-One-touch fitting (P, R ports) Applicable tube O.D.: 8 (X, PE ports) Applicable tube O.D.: 6 2n1-M5

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

VQ7-6/7-8

AXT502-9A Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) 4 Number of manifold blocks required for mounting (stations) 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 1 station 2 VQ7-6-FHG-D 4 2 Use of Control Unit VQ7-6-FG-D 4 2 1.

7.4

S07 1 2 5 C4 G Connector kit 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 2 setsValve part no. (Stations 3 to 4) 2 setsValve part no. (Stations 5 to 6) 2 setsValve part no.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

D-H7NF D-C73C 0.6 + 2(n 2 2 ) (n = 2, 4, 6) C-C80C 0.6 3.1 3.1 + 2(n 2) 0.4 D-H7C 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-H7LF 0.8 2.8 2.8 + 2(n 2) 0.4 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-B5 0.6 2.7 2.7 + 2.2(n 2) 0.4 D-B6 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-B59W 0.8 2.9 2.9 + 2.2(n 2) 0.6 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-G59 0.6 2.8 2.8 + 2(n 2) 0.4 D-K59 6-14-6 7 Series NCM Construction: Double

4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

SMC Basic Pneumatics

J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

%silltr

J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

T

/Specifications K TFU 0805B-3 3 cores 4 6 8 2.5 4 5 TFU 0805B-2 2 cores TFU 0604B-3 3 cores TFU 0604B-2 2 cores TFU 0425B-3 3 cores TFU 0425B-2 2 cores Model M Burst Pressure Characteristics Curve and Operating Pressure Max. operating pressure (at 20C) Fluid Tubing I.D.

EXxx-OMN0027CN

4 3 2 1 0 Byte 0 0 Bit No. 0 1 1 1 2 1 3 1 4 1 5 (0) 6 1 7 1 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No. 0 1 1 1 2 (1) 3 1 4 1FREEZE 5 1SYNC 6 (0) 7 1 3 7 6 5 4 3 2 1 0 Byte 2 0 0 0 0 0 0 0 Bit No. 06 (0) 7 1 PROFIBUS DP Byte 3 PROFIBUS FFh ID Byte 45 IDEX600-SPRA ID 1411h -72No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 6 0 0 0 0 1 1 0 1 Bit No. 07 0Eh(13 ) System diag.1 7 6 5 4 3 2 1

2/3 Port Valve

7 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15(11) 2 9 Others 20(14) 3 Option 25(16) 4 1 1 Valve size 2 to 9 1 4 32(22) 5 1 B 1 4 32F Flange 40A 1 1 2 40(28) 6 1 B 1 2 40F Flange Electrical entry/Indicator light and surge voltage suppressor 2 50A Nil 50(33) 7 50F G Grommet Air operated 2B Flange E GS Grommet with surge voltage suppressor Grommet terminal 2 B 1 2 65F 65(45) 8 Flange Grommet terminal

CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

125

Manifold base Port 2(A) side Port 2(A) side Internal pilot Common external pilot + + + + Blanking plate assembly VVEX2-2 (Common external pilot) Exhaust from both ends when there are 5 stations or more. 2 x M5 Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P):

VCW

OUT (2) 2 Port size (1) IN Port size 1/8 (6A) Symbol 01 02 03 04 06 Class 3 Class 2 Class 4 Voltage 1/4 (8A) 3/8 (10A) 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC 1/2 (15A) 3/4 (20A) Orifice size Orifice size (mm) Class 3 Class 2 Class 4 Symbol 2 3 4 5 7 10 Please consult with SMC regarding other voltages. 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Note) Note