2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

IR1000/2000/3000

-X465 0.1 to 1 Set pressure range (MPa) Desolution of setting and display (MPa) Power supply voltage Specifications AU 0.001 Class 10 With M5 fitting (Applicable tubing O.D. 6) Pressure switch Cleanliness Breather port 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With reverse connection protection) 45 mA or less (but 70 mA or less at current output) AF IR1000/2000: With M5 fitting (Applicable

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

, 40 mA, 20 mA IC circuit, Relay, PLC No Reed auto switch D-A90 D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference

Table of Contents

Note 4) Install a circuit breaker with a sensitivity of 30 mA or less.

Refrigerated Air Dryer

Note 4) Install a circuit breaker with a sensitivity of 30 mA or less.

INFORMATION Step Motor Controller 5 types of communication protocols New New

or less 130 mA or less 200 mA or less 100 mA or less 100 mA or less Compatible encoder Incremental A/B phase (800 pulse/rotation) Protocol EtherCAT*2 EtherNet/IP*2 PROFINET*2 DeviceNet IO-Link Communication specifications Applicable system Version*1 Conformance Test Record V.1.2.6 Volume 1 (Edition 3.14) Volume 2 (Edition 1.15) Specification Version 2.32 Volume 1 (Edition 3.14) Volume 3

Refrigerated Air Dryer

Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.