Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread)

Pressure: 3 (For Compound Pressure (-101~101kPa)), Port Size: M5X0.8, Option: L (Sensor Cable)

Pressure: 1 (For Vacuum (0~101kPa)), Port Size: M5X0.8, Option: L (Sensor Cable)

Type: Pressure Sensor, Fluid Type: Air, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range

Type: Pressure Sensor, Fluid Type: Air, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Pressure: For Compound Pressure (-101~101kPa), Port Size: M5X0.8, Option: Sensor Cable

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 12 + 0.2 0 0.1 0.3 NX A1 U1 L1 7 12 Material: Stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Part no.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

CE

25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

Basic Type/Direct Mount Type

A (Operating direction) CY3RG20 (mm) B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x

CE

stroke 25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

Mounting style B L F 12 mm equivalent S 1 pc.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

7 2 x M5 x 0.8 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 2.4 mm2 Effective area: 2.4 mm2 Weight: 5.3 g Weight: 4.8 g Extension Fitting: M-5J Nipple: M-5N Width across flats 7 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 4.0 mm2 Effective area: 4.0 mm2 Weight: 3.6 g Weight: 1.5 g Universal Nipple: M-5UN Bulkhead Union: M-5E M5 x 0.8 M8 x 0.75

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 Single Double Closed center Exhaust center 0.60 0.60 0.56 0.60 0.43 0.43 0.15 0.20 0.15 0.15 0.13 0.15 0.59 0.59 0.59 0.59 0.30 0.30 0.22 0.22 0.15 0.15 0.14 0.14 Body ported Base mounted (With sub-plate) 2 position Body side M5 x 0.8 3 position M5 x 0.8