HRX-OM-T002

Table 5.19-28 Operation setting when "Pump maintenance" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

Compact 5-Port Solenoid Valve

VZ1000-11-4L 8 5.5 (35) (25) (10) Rail mounting hole pitch 12.5 No. 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 L dimension 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 273 285.5 298 310.5 323 Weight [g] 24.8 28 31.1 34.3 37.4 40.6 43.8 46.9 50.1 53.3 56.4 59.6 62.7 65.9 69.1 72.2 75.4 78.6 81.7 No. 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 L dimension

Compressed Air Preparation Filter

Recommended Torque Unit: Nm AFF20 AM20 AMD20 AMK20 AFF50/AFF60 AM50/AM60 AMD50/AMD60 AMK50/AMK60 AFF30 AM30 AMD30 AMK30 AFF40 AM40 AMD40 AMK40 Connection thread 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Applicable model 4. When an SMC One-touch fitting is used, refer to the operation manual for the One-touch fitting.

New

28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

MK

RE A B (mm) Mounting Rail mounting style Direct mounting style REC D-A7H/A80H D-A73C/A80C D-F7/F79F/J79 D-F7V/J79C D-F7BA/F7W D-J79W/F7WV D-M9 D-M9V D-F9W VD-F9W D-A79W D-A9 D-A9V D-A7/A8 D-F9BAL D-P5DWL CX Model A 28 28.5 32.5 23.5 28 28 A 28 29 33 24 28.5 28.5 B 6.5 7 6 8.5 11.5 14.5 B 7 7.5 6.5 9 12 15 A 25.5 26 30 21 25.5 25.5 B 4 4.5 3.5 6 9 13 A 19.5 24 24 B 4.5 7.5 10.5 A 31.5 22.5

CLQ

For details, refer to page 9-15-39. 9-10-28

PF-OMM0004_C

49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W721 56 91 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78

PF-OMN0011_C

/IN (/15 V ) 3 DC() 4 INPUT (15 V ) COPY OUT2 OUT1 DC() DC() -16No.PF-OMN0011CN-C ,FG () SMC(1) ZS-28-CA-4() 1.151.35 ZS-28-C-1 1.01.2 AWG23 1.14ZS-28-CA-4 1 2 3 4 PF3W5 M8 A A ,LLL -17No.PF-OMN0011CN-C NPN2 PF3W30A PNP2 PF3W30B DC(+) DC(+) OUT1 OUT1 OUT2 OUT2 DC(-) DC(-) / / Max.28 V80 mA 1 V Max.80 mA 1.5 V NPN PF3W30C NPN PF3W30D PNP PF3W30E PNP PF3W30F

LFE-OMY0008

DC() OUT1 OUT2 DC() OUT1 OUT2 DC24V DC24V DC() DC() Max.28 V80 mA 1 V 420 mA 600 Max.28 V80 mA 1 V 15 V 1 k 22 No.LFE*-OMY0008 NPN2 LFEA NPN LFEC LFED OUT1 OUT2(LFE*A***) DC() DC() OUT1 PNP2 LFEB OUT2 OFF( 23 No.LFE*-OMY0008 1 3 (OFF) 1 1 ON OFF ON OFF [L/min [L/min [L/min [L/min] ] ] ] ON ON ON ON OFF OFF OFF OFF ( ( ( ( ) ) ) ) 24 No.LFE*-OMY0008 1 [P_1][n_1] 1

HRX-OM-W058

Table 3-4 Piping port size Name Port size*1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more 1.0MPa more Automatic water-fill port *2 Rc3/8 22 to 24Nm (Automatic water-fill pressure 0.2 to 0.5MPa) Overflow port *2 Rc3/4 28 to 30Nm Inside diameter 19mm more of piping

HRX-OM-X037

(B contact). (1) (2) (3) Setting of contact output signal 1 to 3 Table 5.4-28 Setting of contact output signal 1 to 3 No.

HRX-OM-X084

Table 3-10 Piping port size Description Port Recommended Recommended piping size tightening torque specifications Circulating fluid outlet port Rc1/2 28 to 30Nm 0.4MPa or more*2 Circulating fluid return port Rc1/2 28 to 30Nm 0.4MPa or more*2 Facility water inlet port *3 Rc3/8 22 to 24Nm 1.0MPa or more (Supply puressure: 0.3 to 0.5MPa) Facility water outlet port *3 Rc3/8 22 to 24Nm 1 For NPT

EXxx-OMK0006

Bit number Value Meaning 0 EMCY exists (is valid) 31 (MSB) 1 EMCY does not exist (is not valid) 30 0 Reserved 0 11 bit ID (CAN 2.0 A) 29 1 29 bit ID (CAN 2.0 B) 0 if bit 29 = 0 28 to 11 X if bit 29 = 1: bits 28 to 11 of 29-bit-COB-ID 10 to 0 (LSB) X bits 10 to 0 of COB-ID : The default values when the SI unit is supplied.

Electrostatic Sensor Monitor

For heavy stains, use a cloth soaked with diluted neutral detergent and fully squeezed, then wipe up the stains again with a dry cloth. -6No.SFOD-OMO0004-B Model Indication and How to Order Options/Part number Description Part number Remarks Power and output lead wire ZS-28-A Length 2 m Bracket ZS-28-B With M3x5 L (2 pcs.) Connector for sensor lead wire ZS-28-C 1 pc.

LEYx-OMZ0015

27 31 27 28 27 25 7 Parts list No.

HRX-OM-I051

Pipe diameter Table 3-3 Pipe Diameter Pipe Diameter Recommended torque (Material: SS* vs SS) Facility water inlet Rc1/2 28 to 30Nm (20.7 to 22.1ft-lbf) Facility water outlet Rc1/2 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid supply Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Circulating fluid return Rc3/4 28 to 30Nm (20.7 to 22.1ft-lbf) Main tank drain port Rc3/8 (with valve) Piping not necessary

Electric Actuator Miniature Rod Type Miniature Slide table Type

for each operation type on P.28 expected step number is inputted to the controller, because the input signal time was too short.

A

NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,

5 Port Air Operated Valve Series SYA3000/5000/7000 1

) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

21

75 161 9 15 40 40 50 4 28 75 174 Use a thin wrench when tightening the piston rod.