Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series RoHS Stainless steel Universal Elbow 1 AS-F Model TMH ASD Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Made to Order (Refer to page 681 for details.) 680 AS-FG Series Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type How to Order AS 2 1 0 3 F G 01 06 Body size Lock nut option Nil J Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Control type AS-F 0 1 Meter-out Meter-in Made to Order (Refer to the below for

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

Vacuum Filter AFJ Series

m 40 m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow

CE2

25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5 51 8 218.5 1/4 161.5 288.5 27 M14 x 1.5 66 11.2 52 304.5

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. Each product is not assembled.

P

10 14.5 4.5 U40 40 43 7 18 13.7 18.5 6.5 U50 50 53 7 18 14.7 19.5 7.5 Model Nom.size D10 A 10 ZP10Dl B 12 C 4 D 13 E 10.7 F 15 Y 6 Put in the symbol for material at the end of model no.

Digital Flow Switch Series PFA For Air Series PFW For Water

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

T

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/12855 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS15, CXSL15 10-/11221221Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

PFxx-OMP0001CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMP0001CN-F [F 2] OUT2 OUT2 (28 )(29 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] OUT2 [---] [oU2][] [2ot][] 37 38 39 40 -36No.PF-OMP0001CN-F a.

PSxx-OMM0002CN

[000] <> (40)~(40) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -41No.PS-OMM0002CN-F , (1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F ZSE80(F)/ISE80(H) ,, (), No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -43No.PS-OMM0002CN-F No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 -44No.PS-OMM0002CN-F No.

HRX-OM-W038

40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

ML1C

DPiston speed V (mm/s) -X 1107 Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series 25, 32, 40 How to Order Hy-rodless cylinder (With brake) ML1C G 25 300 H M5BW Made to Order Refer to page 1109 for details. Number of auto switches Bore size (mm) 25 32 40 25 mm 32 mm 40 mm Nil S n 2 pcs. 1 pc. n pcs.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

VCB

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.