10

R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 A B B1 C D E F Size M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 22 22 29.5 43 45 45 50 21 22.5 22.5 25 61 (67) 74.5 (82.5) 79 (87) 85.5 30 35 40 40 9.5 10.5 10.5 14 20

LEC-OM071xx

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

CLS

For details, refer to page 9-15-40. 9-9-21 22 Series CLS Proper Auto Switch Mounting Position of Cylinder Section (Detection at stroke end) and Its Mounting Height D-F5/J5, D-F5NTL D-F5W/J59W D-F5BAL/F59F D-A3 D-G39/K39 G (PF) 1/2 (Applicable cable O.D. 6.8 to 9.6) (33) 30 Auto switch A A B 49 Ht Ht 34 56 Hs Hs B 30 (33) 36 Auto switch ( ): Denotes

LEY-OM007

g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 80.00 3000 3000 80 40 30 100 70.00 100.00 25.00 No.00[mm] 80[mm] 1AREA [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 0 [%] f 40 40[%] INPON ON INP OFF P.41 7.2 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 2AREA AREA1 2 [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 40 0 [%] f 170[mm] 2100[mm] AREAON

IDU/IDF

Power cord outlet IDU6D to 15C, IDF6D to 15C IDF75C A 240 240 30 30 240 240 65 65 B 40 40 49 49 40 40 40 40 Model IDU6D IDU8D IDU11C IDU15C IDF6D IDF8D IDF11C IDF15C E 225 225 181 Model IDF37C1 IDF55C IDF75C A 425 190 208 B 375 140 158 C 75 75 66 D 153 153 144 Power cord outlet (17) Grommet with waist Back side Cooling water outlet Cooling water inlet A D E Compressed air pressure gauge B

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For 1/8 For C6/N7 42 Series SYJ5000 C4 N3 Type 43: Side Ported/SS5YJ3-43Stations [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 L2 4.5 Manual override 2-5.5 (For mounting) 12 1/8 (P, R port) 62.7 [64.9] 62.1 [64.3] 40.6 (DIN 41.8) 40 (DIN: 41.2) 87.2 [91.6] 103.2 [107.6] R P P R B B B B B 17.5 11.4 36.9 20.3 A A A A A 3 (DIN: 4.2) 1 (4.4) 18.4 (DIN 19.6) (Pitch) P = 16 18 Built-in

IZx-OMT0049

34 22 16 64 58 46 40 34 22 16 64 58 46 40 34 22 16 40 200 100 20 100 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 Pressure [MPa] Pressure [MPa] Pressure [MPa] MPa MPa MPa a) Air supply from one side IZT4-16,22,34,40,46,58 Tube: O.D. 6 I.D. 4 b) Air supply from both sides IZT4-64,82,112 Tube: O.D. 6 I.D. 4 Measures pressure Measures Air supply 10mm IZT4-130,160,190

XM, XY

/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39

/

B K L K L M 40 M 40 2 x P 1 (IN), 2 (OUT) port (50) (50) 2 x P 1 (IN), 2 (OUT) port DIN terminal: D Conduit terminal: T 19.5 53.5 65.5 19.5 34 (69.5) (100.5) 30 32 T Width across flats 27 Width across flats 27 31.5 (44) 25 Applications A A T G1/2 OUT IN OUT IN B B G1/2 K L K L M 40 40 M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port (50) (50) 2 x P 1 (IN), 2 (OUT) port With bracket 67 VXED2130-

Large Size Vacuum Module: Series ZR

B Bracket B Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

A B Hs MXY MTS Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV A B C A B Hs Hv A B C A B Hs Hv A B C A B Hs Hv 15.5 15 20 15 20 19.5 46 19.5 31.5 46 46 19.5 31.5 18 46 19.5 35.5 42 15.5 13 42 12 17 17 22 17 22 21 47.5

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

Valve Single Unit

(A, B port) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 Applicable tubing O.D.: 4, 6 Polarity indicator Manual override Manual override (Mounting hole for manifold) A: Orange B: Green A: Orange B: Green (Press and turn for the locking type.)

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

MVGQ

Replacement Parts -X Description 12 No. 16 20 25 32 40 50 63 80 100 MGQ100-PS Seal kit MGQ12-PS MGQ16-PS MGQ20-PS MGQ25-PS MGQ32-PS MGQ40-PS MGQ50-PS MGQ63-PS MGQ80-PS !9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

AWG

Construction AWG30/40 AWG20 D B K P C C C U K P O A A S H L to C U S O H L to B D !

Process Valve Series VNA

(305) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 8 VNC 1 4 1 4 VNH Note) ( ): CE compliant product (-Q) VND Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5

Pin Clamp Cylinder Series CKQ/CLKQ

CKQ CLKQ B B B B B B A 14 49 B B A 14 49 B A 14 49 B A 7 42 A 10 45 A 11.5 46.5 A 11 46 19 or more 17 or more 33 or more 27 or more 28 or more 27 or more 22 or more 30 or more 22 or more 17 or more 54 or more 52 or more Auto Switch Mounting Height Atmosphere General use Mounting Rail mounting Rail mounting Welding Direct mounting D-A7 D-A80 D-A7H D-A80H D-F7BAL D-F7W D-J79W D-F7NTL D-F79F

MQQ

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100