High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

1 FKM:No.1349-80 ** [] AS568-025-XN1 7 XL-OMY0001 / 16 25 40 50 XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

XL-OMV0002

227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** 1)(FKM:No.1349-80)(**) AS568-025-XN1 2)4 3) FKM for ULTIC EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

XL-OMY0002

** B2401-V85 ** AS568-349 ** B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

XL-OMY0003

-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15 ** B2401-V24** B2401-P42 ** AS568-227 ** 1) FKM:No.1349-80** AS568-025-XN1 2) 4 3) FKM for EPDM Barrel ULTIC ARMOR R R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

HRX-OM-W032

PV SV HRS Series 5.21 Communication Function 5-75 HRX-OM-W032 Chapter 5 Display and Setting of Various Functions 30. Perform setting for the contact input signal 1 with [] key or [] key, and press [SEL] key to enter.

Air cylinder (Series compatible with secondary batteries)

D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center trunnion (Different surfaces and same surfaces) 15 80 85 90 75

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

SFOD-OMT0005CN

OFF (SVRE OFF )[LK RLS]DC24V LK RLS LK RLSDC24V LK RLS (EMG) /(LEC ) -73- 18 18.1. / JXC91EEPROM1,000,000 -74- 18.2 ON 5 () -75- 18.3 18.4 () -76- 18.5 18.6 D(100) 18.7 -77- 19 ,, (), YES NO JXC LED 1 MSNS 2 ALM 3 (LEC-W2) 4 5 -78- No. 3(P.12) 5(P.23) SVON ON PWR() 1 LED 5. (P.23) 6.

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, D7, ISE70/75 1/4 EURO VERSION, 1.13787 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, 1.21487 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, D7, ISE70/75 1/4 EURO VERSION, .58790 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, .56541 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, .61729 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, 1.03189 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, D7, ISE70/75 1/4 EURO VERSION, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, .93696 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4 PT VERSION, .93696 lb

Please contact us for the latest version.sales@ocaire.com, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, DA, ISE70/75 1/4" PT VERSION, .54013 lb