XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12

VEX1

Model VEX55 04 06 10 Description VEX5710 12 VEX5914 20 Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Pressure gauge 5.1-27 How to Order How to Order Pilot valve 1 06 2 E Z 5 1 B VEX5 SF4 20 B Bracket Option Electrical entry Economy valve Coil rated voltage G Pressure gauge (Ex.)

AC Servo Motor Driver (Pulse input type/Positioning type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial value Recommended Value Parameter *1,*2 Para No Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3. PA06 1 100 (Positioning mode: 10) Electronic gear denominator *3.

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

Title not found

ro 40mm cn y q c k r l o B e .

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

HRX-OM-X037

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U D-A79W D-F7WV D-F7V D-F7BAVL A B A B Proper auto switch mounting positions (mm) D-A7H, D-A80H D-A73C, D-A80C D-F7 D-F7V D-F7W, D-F7WV D-J79 D-J79C, D-J79W D-F7BA D-F9 D-F9V D-F9W D-F9WV D-A7 D-A80 D-A9 D-A9V D-F7F D-F9BAL D-A79W D-F7NTL Bore size (mm) A B A A A A B A A A B B B B B B 20 20.5 11.5 21 18 25 26 12 9 16 17 32 27 20 27.5 24.5 31.5 26 19 30 29 32.5 20.5 17.5 24.5 23 22 25.5

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common

OMR0031

(Unit: mm) Separate position ranges can be set for up to two outputs: AREA A and AREA B. The position ranges should be set as follows: Position 1 Position 2. Part No. Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

(B contact) 2 pcs.

HRX-OM-W060

HRX-OM-W060-B Operation Manual Installation Operation Original Instructions Thermo Chiller HRL Series HRL100-A-20 HRL200-A-20 HRL300-A-20 Keep this manual available whenever necessary 2019 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product).

53

time 1 min 30 s 20 s Max.

Model Selection 1

Next, measure this flow rate at 80%, 60%, 40%, 20% and the upstream and downstream pressure. And then, obtain the sonic conductance C from this maximum flow rate. Besides that, substitute each data of others for the formula of subsonic flow in order to find b, then obtain the critical pressure ratio b from that average.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

D-M9V D-M9MV D-M9AV D-A9V Hs Hs Auto switch Auto switch 16.5 16.5 A B A B 22 20 (22) ( ): Dimension of the D-M9AV A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.

39

300.025 250.03 12.5 11 through P P Q M8 x 1.25 150.03 180.03 R28 Q M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 NAAMS code ACA007M ACA008M ACA009M ACA010M ACA011M ACA012M NAAMS code ACA019M ACA020M ACA021M ACA022M ACA023M ACA024M A B C D E F G H I A B C D E F G H I Part no.

15

Bumper bolt (resin tipped): Mounted on both sides Nil Bore size 6 10 15 20 25 32 40 Bumper bolt (Same as the opposite side) 6 mm Port thread type Adjustment bolt (Same as the opposite side) 10 mm Bore size (mm) Symbol Type 15 mm Shock absorber/ Adjustment bolt (metal ended): Mounted on both sides 6,10,15 M thread B 20 mm Nil Rc 25 mm TN TF 20, 25, 32, 40 NPT 32 mm Shock absorber (Same as

VZS

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold