100

(Representative value) ZL3H (04P) ZL3M (04P) Supply pressure: 0.5 MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series

LEF-OM002xx

500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.

Compact Guide Cylinder

Compact Guide Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS Bore sizes 80, 100 added. Port thread types NPT, G added.

Short Stroke Electric Actuator Series LX

For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 50 50 2.1 1.1 0.3 0.1 2.1 1.1 0.3 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 0.6 0.2 0.1 1.1 0.6 0.2 0.1 200 200 0.7 0.5 0.2 0.1 0.6 0.4 0.2 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

CJ2

to 750mm/s C85 0.035J Allowable kinetic energy 10 0.090J 16 CG1 No freezing MB Standard Stroke (mm) C95 Bore size Standard stroke 10 15, 30, 45, 60, 75, 100, 125, 150 CA1 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CS1 Minimum Strokes for Auto Switches Mounting Min. stroke (mm) Mounting Auto switch model Number of switches 2 (same surface) 50 D-C7 D-C8 2 (different surfaces) 15 1 15 D-H7

Series KV2 Fittings

/800 100/800 100/800 100/1000 100/800 100/600 100/400 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/200 100/200 50/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

33

capacity 1900/2200 W (50/60 Hz) Symbol Option Nil None T High pressure pump mounted Note) HRS 090 HRS 100/150 Note) The cooling capacity will decrease by about 100 W from the value in the catalog.

Stroke Reading Cylinder and Counter

Series Variations CE1 Series CEP1 Series Standard stroke (mm) Standard stroke (mm) Manufacturable stroke range Manufacturable stroke range Bore size (mm) Bore size (mm) 25 50 75 100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

Industrial Filters

) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400 267.4 230 510 915 1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935

7ND9071en

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Air-hydro Unit

24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Modular F.R.L. Units

100 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)]

VZS

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series Average speed (mm/s) 800 700 600 500 400 300 200 100 0 It is when the cylinder is extending that is meter-out controlled by speed controller which

MK

Since it can be locked at any position, it can deal with freely the changes of thickness of a workpiece. 32 50, 75 100, 125 150 40 Single knuckle joint Double knuckle joint (with pin) Dog for limit switch Dog fitting CLK1 Standard 50 Double clevis Spring rod 63 40 50, 75 100, 125 150 With magnetic field resistant auto switch CLK1G 50 63 With magnetic field resistant auto switch Series CLK1