SL5200

0.17 25 0.14 20 A Connections (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 0.10 15 (70.6) 2.78 0.07 10 2.12 (53.8) 0.03 5 3.86 (98.0) 0.00 0 0 5 10 15 20 25 30 35 40 45 50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101 0 Hastelloy is

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R2) 5 (R1) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-25 8 Series SYJA7000 Specifications Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 Fluid 2 position single Operating pressure

AN

C12 (12 One-touch fittings size) ANA1-C10 15 13 76 22 ANA1-C12 33 Only R (PT) is available. 19 95 25 Construction/Dimensions ANA1-C08 to C12 Series Symbol Noise reduction level A1 40dB(A) Specifications Compressed air Fluid 1.0MPa Max. operating pressure 40dB(A) Noise reduction effect 5 to 60c Ambient and fluid temparature Refer to p.5.2-4 for precautions on these products. 5.2-5 38dB(A

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

threads 10 24 29.4 25 18.5 35 17 17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Symbol Model Double acting: External grip Opening angle (Both sides) Weight (2) (g) Opening Closing Effective gripping force (Nm) Model Bore size (mm) MHW2-20D 300 5 0.30 20 MHW2-20D1 320 MHW2-25D 510 6 0.73 25 MHW2-25D1 540 MHW2-32D 910 5 180 1.61 32 MHW2-32D1 950 Made to Order (Refer to pages 725 to 748 for the details.)

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 836 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP16 11223 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2 x M5 x 0.8 depth 8 Stroke: S 2 x M4 x 0.7 depth 6 11-/22-MXP16-20 A 4 x M5 x 0.8 depth 7 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port H Width across flats 8

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Applicable rotary actuator Applicable air gripper Size Page Size 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ MRQ MDSUB MSQ MHZ2 MHZJ2 MHL2 MDHR MHS 12-25 MHK MHS MHC2 MHT2 MHW2 10-25 10/16 MHY MRHQ 2.11-8 D-A72/A73/A80 Grommet D-A72H/A73H D-A76H/A80H 2.11-9 Rail Connector 2.11-10 D-A73C/A80C D-A53/A54/A56

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

X Y Z 12-CY3R15 53 4.3 5 161. 18 191. 171. 25 161. 18 54.5 194 184 32 M4 x 0.7 12-CY3R20 62 5.6 5 171. 17 20.5 201. 40 191. 22 641. 107 195 38 M4 x 0.7 12-CY3R25 70 5.6 6 16.5 20 21.5 22.5 40 21.5 28 721. 117 105 43 M5 x 0.8 12-CY3R32 76 71. 7 18.5 26 241. 281. 50 271. 35 791. 130 116 54 M6 x 1 12-CY3R40 90 71. 8 111. 34 261. 331. 60 321. 40 931. 148 134 64 M6 x 1 165 Specific Product Precautions

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K 8 6 6 5 N I ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 45 181 159 146 146 7

Vacuum System Peripherals:

Hysteresis 1 Output deviation (% F.S.) 0.5 Out Out How to Order 0 Return Return ITV 209 0 0 1 2 5 S 0.5 Pressure display unit Pressure range 5 kPa 9 1.3 to 80 kPa 1 0 25 50 75 100 Cable connector type Input signal (% F.S.)

VZ100/300/500

VZ 3 5 2R X20 ( ) VZ 3 5 X1 ( ) Entry is the same as standard products. Entry is the same as standard products.

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

OMR0032

Open collector input Turn ON No. 1 and No. 4, and (b) 5 VDC+/5% R1 = 220 turn OFF the others. Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

Modular Type Filter Regulator Series AW

2) Note 3) Pressure gauge Symbol 0.2MPa Note 3) Note 4) AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) Float type auto drain N.O.

IIIIIIIIII

F-4200-.5 F-4200-2 F-4200-5 F-4200-15 F-4200-30 F-4200-60 F-4200-100 .05 .2 .5 .5 .5 .5 1 .5 2 5 15 30 60 100 15 30 30 45 60 120 120 .05 .1 .4 1.0 1.8 3.5 3.5 .15 .3 .8 1.6 2.4 5.0 7.5 3A 10A 10A 10A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID

PFxx-OMS0001CN

4 mA [F98] -56No.PF-OMS0001CN-A [F99] <> [F99] [iNi] [ini] [] [oFF] [oN] 5 [F99] -57No.PF-OMS0001CN-A 1 // () 1 -58No.PF-OMS0001CN-A [LoC][][LoC] 1 [LoC]1 < -> 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] -59No.PF-OMS0001CN-A < -> [F81] 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] ( ) [000] 1 [UNLoC] [FAL] 3 [LoC] /30 -60No.PF-OMS0001CN-A [000] <> [UNLoC] 5 ( ) 1 1 -61No.PF-OMS0001CN-A

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4