LEKF-OMZ0035

S2 100 25 LECSA-S1 R Right side parallel AC servo motor S3 200 32 LECSA-S3 Incremental L Left side parallel S4 400 40 LECSA2-S4 encoder Lead[mm] LECSB2-T5 Symbol LEKFS25 LEKFS32 LEKFS40 LECSC2-T5 T6 100 25 LECSN2-T5H 20 24 30 LECSS2-T5 A 12 16 20 LECSB2-T7 B 6 8 10 AC servo motor LECSC2-T7 T7 200 32 Absolute encoder LECSN2-T7Stroke LECSS2-T7 50 50 LECSB2-T8 to to LECSC2-T8 T8 400 40 LECSN2

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

High Power Cylinder:

(In case of 500 stroke) (kg) Bore size (mm) 20 25 32 40 Please consult SMC about bore sizes 50, 63, 80 and 100.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

ML2B

Horizontal and lateral Mounting Vertical Mounting 50 RS H A 2.

ML2B

Horizontal and lateral Mounting Vertical Mounting 50 RS H A 2.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Performance Curves/Built-in Solenoid Type/Air Operated Type 1l/min = 0.035SCFM 1MPa = 145psi Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

NCA1

to 140F (5 to 60C) 40 to 140F (5 to 60C) 0 to 140F (5 to 60C) Ambient & fluid temperature 2 to 20 in/s CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug

NCA1

to 140F (5 to 60C) 40 to 140F (5 to 60C) 0 to 140F (5 to 60C) Ambient & fluid temperature 2 to 20 in/s CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug

SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 P N 1 2 D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

ZQ-OM01401

(PD) 80 80 0.45MPa 70 70 [L/min(ANR)] [L/min(ANR)] 0.5MPa 0.35MPa 60 60 50 50 0.25MPa 0.35MPa 0.3MPa 40 40 0.15MPa 30 30 20 20 0.05MPa 10 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD) 80 70 [L/min(ANR)] 0.45MPa 60 50 0.35MPa 40 0.25MPa 30 0.15MPa 20 0.05MPa 10 0 0 1 2 3 4 5 [] 38 - No.ZQ-OM01401-B V [L/min (ANR) ] 1) (PD) V P,PS [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.1 0.2 3.2 0.3 38 (29)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

VQ5000

53 66 162 50 41 37 31.5 18 A B A B 53 40 66 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole 18 31.5 37 41 50 98 G1/2 Electrical entry G1/2 PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2

Air cylinder (Series compatible with secondary batteries)

trunnion (Different surfaces and same surfaces) 15 80 85 90 75 1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8

Series VQ Base Mounted Metal Seal/Rubber Seal

Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 4 2.7 (0.15) VQ0 (Metal seal) 4 3.6 (0.2) VQ0001 (Rubber seal) Series VQ1000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 300mm Series CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

HRX-OM-W032

Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-4: Pump capacity HRS Series 8.4 //Cooling Capacity 8-5 HRX-OM-W032 Chapter 8 Documents 8.6 Types of Hazard Labels To ensure the safety of the operators,