ZQ-OM01401

(PD) 80 80 0.45MPa 70 70 [L/min(ANR)] [L/min(ANR)] 0.5MPa 0.35MPa 60 60 50 50 0.25MPa 0.35MPa 0.3MPa 40 40 0.15MPa 30 30 20 20 0.05MPa 10 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD) 80 70 [L/min(ANR)] 0.45MPa 60 50 0.35MPa 40 0.25MPa 30 0.15MPa 20 0.05MPa 10 0 0 1 2 3 4 5 [] 38 - No.ZQ-OM01401-B V [L/min (ANR) ] 1) (PD) V P,PS [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.1 0.2 3.2 0.3 38 (29)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

VQ5000

53 66 162 50 41 37 31.5 18 A B A B 53 40 66 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole 18 31.5 37 41 50 98 G1/2 Electrical entry G1/2 PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2

Air cylinder (Series compatible with secondary batteries)

trunnion (Different surfaces and same surfaces) 15 80 85 90 75 1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8

Series VQ Base Mounted Metal Seal/Rubber Seal

Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 4 2.7 (0.15) VQ0 (Metal seal) 4 3.6 (0.2) VQ0001 (Rubber seal) Series VQ1000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 300mm Series CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

HRX-OM-W032

Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-4: Pump capacity HRS Series 8.4 //Cooling Capacity 8-5 HRX-OM-W032 Chapter 8 Documents 8.6 Types of Hazard Labels To ensure the safety of the operators,

OMR0032

LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

CEx-OMQ0011

(), Err9 -1.0 +1.0 WRITE 3P3 9 PRG STEP P3 9 " " " " 46 24 5 WRITE 4P4 PRG STEP P4 40 " " " " 25 32 40 50 63 80 100 DOWN UP ML22532 40 50~100 1 WRITE 5P5 <> 100 PRG STEP P5 " 0 " " " 0 10 20 30 40 50 UP DOWN 1 WRITE 47 6P6 1 WRITE 7P7 PRG STEP P6 0.0 )200.0 (P.57 13-2 0.009.99sec10ms 1 WRITE 8P8 PRG STEP P7 200 " " " " 0.009.99sec10ms 1 WRITE PRG STEP P8 200

Vacuum Pad

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

Short Stroke Electric Actuator Series LX

(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

Speed Controller with One-touch Fitting

(40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35) AS421F-04-10(S)A 10 1/2

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Electric Actuator / Slider Type 《 AC Servo Motor 》

For 50-mm stroke type, only four bolts are tightened on the motor side.

3 Port Air Operated Valve Series SYJA300 1

VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.