Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Size Suction flow rate L/min (ANR) 20 25/32/40 Bore size (mm) Item 20/25/32/40 1 2 1.5 MPa 1.0 MPa 0.2 MPa 10C to 60C (With no freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion 50 to 400 mm/s Air cushion Stroke length tolerance +1.0 0 Up to 250

Clean Gas Filter

Part No.: SFB100-02X8 002 Part No.: SFB200-02-S -X40 V Specifications Fluid Air Nominal filtration Operating pressure Max. 0.99 MPa Nominal filtration m Note 1) Rated flow rate L/min (ANR) Note 2) Symbol 001 002 005 010 020 040 070 100 Max. operating temperature 80C O-ring 1 2 5 10 20 40 70 100 5 10 15 30 50 80 130 250 Element proof differential pressure Symbol N V T Material NBR FKM PTFE

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

AC coil: No more than 10% of the rated voltage. 2 Energizing in a long run For use of long run energizing, the continuous energizing time should not exceed 30 days and the valve must be operated at least once per 30 days.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

25

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

Plug-in Unit

Refer to manifold ordering. 23 24 21 22 19 20 17 18 Terminal no. 28AWG 15 16 6 13 14 Red 11 12 9 10 7 8 26 2 25 1 30 (20P) 37.5 (26P) Connector terminal number 5 6 3 4 1 2 Triangle mark indicator position <26P> <20P> (15.6) Polarity Terminal no. Polarity Terminal no. () L SOL. A SOL. A (+) () (+) 1 1 Station 1 Station 1 SOL. B SOL. B (+) () () (+) 2 2 SOL. A SOL.

ITVH

ARP No load voltage [V peak] Max. current rating [A] 0 to 20 [V] 5.0 IR-A 100 IR Over 20 [V] to 30 [V] Peak voltage 2) A circuit using max. 30 [Vrms] or less (42.4 [V peak]), which is powered by UL1310 or UL1585 compatible Class-2 power supply. 4.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Relationship of liquid entry and sliding distance Amount of liquid entry (g) X 15 10 Standard cylinder Stainless steel cylinder 5 0 50 100 150 200 Sliding distance (km) 250 300 Conditions Working fluid ...Air Pressure .. 0.5MPa Liquid ...

Compact Electric Actuator Series LG1

rigidity direct acting guide 3 Series LG1H LG1H20: Without Coupling / Dimensions 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30

REFRIGERATION AIR DRYERS, AIR COOLING SYSTEM, Series PDE

Before attempting any maintenance operation on the dryer, switch it off and wait at least 30 minutes. During operation the copper piping connecting the compressor to the condenser can reach dangerous temperature able to burn the skin. DAILY =Verify that the DewPoint displayed on the DMC11 is correct. =Check the proper operation of the condensate drain systems.

Pneumatic Transfer System Series MF

50 10 30 50 10 E F E F I I G H G H C D C D 2-N 2-J 2-11 2-M6 x 1.0 M M L 6.2 9.5 SMC SMC 2-K 2-7 Side support A part no.: MF-S32A Side support B part no.: MF-S32B Support bracket A part no.: MY-SA Support bracket B part no.: MY-SB Part No.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Power Valve: Economy Valve Series VEX5

Low pressure air alone is exhausted from the upper chamber in every cycle, so the air consumption is reduced to 20 to 30% of the air consumption by the double acting cylinder with an ordinary change over valve. Excellent operation control The economy valve sets pressure and permits high speed and low speed operation as well as suspension of operation.

ISE70/75/75H

Maximum 30 V (NPN only), 80 mA, Residual voltage 1 V or less See the operation manual for information on how to set and on handling precautions. Output -43 Output -65 DC (+) DC (+) (Brown) (Brown) N.C.

VNC

Wide selection of port size and variations LVA LVH Threaded type (6A to 50A) Flange type (32F to 80F) LVD LVQ LQ LVN Low water hammer TI/ TIL PA Max.1.2 MPa PAX PB In the case of VNC211A (N.C. 0.5 MPa) Peak pressure when valve is closed (MPa) Large valve capacity Av factor 3.0 x 10-5 to 160 x 10-5 (VNC1 to VNC7) Cv factor 49 to 100 (VNC8 to VNC9) Fluid speed (m/s) Conditions: Piping length/30

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?