P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

HRX-OM-W032

Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-4: Pump capacity HRS Series 8.4 //Cooling Capacity 8-5 HRX-OM-W032 Chapter 8 Documents 8.6 Types of Hazard Labels To ensure the safety of the operators,

OMR0032

LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

CEx-OMQ0011

(), Err9 -1.0 +1.0 WRITE 3P3 9 PRG STEP P3 9 " " " " 46 24 5 WRITE 4P4 PRG STEP P4 40 " " " " 25 32 40 50 63 80 100 DOWN UP ML22532 40 50~100 1 WRITE 5P5 <> 100 PRG STEP P5 " 0 " " " 0 10 20 30 40 50 UP DOWN 1 WRITE 47 6P6 1 WRITE 7P7 PRG STEP P6 0.0 )200.0 (P.57 13-2 0.009.99sec10ms 1 WRITE 8P8 PRG STEP P7 200 " " " " 0.009.99sec10ms 1 WRITE PRG STEP P8 200

Vacuum Pad

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

Short Stroke Electric Actuator Series LX

(B contact) mm Standard stroke 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) 3 (2) horizontal Note 1) N.C. (B contact) Body weight kg N.O. (A contact) N.C.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

Speed Controller with One-touch Fitting

(40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35) AS421F-04-10(S)A 10 1/2

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Electric Actuator / Slider Type 《 AC Servo Motor 》

For 50-mm stroke type, only four bolts are tightened on the motor side.

3 Port Air Operated Valve Series SYJA300 1

VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

ZR

Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc. 13-3-13 13 Series ZR Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Set pressure When it is used for work adsorption, set the pressure so that adsorption is complete and reliable.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ANR)] Air consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 Suction flow 60 40 20 Air consumption 0 0 10 20 40 50 60 30 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-12 ZHP-12 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 100 90 80 70 60 50 40 30 20 10 0 Suction flow [L/min(ANR)] Air consumption [L/min

Trimmer Auto Switch

(mm) Description/Series Bore size 10 16 20 25 32 40 50 63 80 100 125 Parallel style MHZ2 3.0 5.5 6.5 8.0 7.5 Parallel style MHZJ2 3.0 5.5 6.5 Parallel style MHS2 (2 fingers) 4.0 4.0 * Parallel style MHS3 (3 fingers) 5.0 4.0 * Parallel style MHS4 (4 fingers) 5.0 3.0 * Air Cylinders (mm) Description/Series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Compact cylinder

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

VVX31/32/33

(C ) Temp. conditions Power source Vacuum 60 10 Air Response Characteristics 40 AC/DC Maximum Minimum AC/DC 20 Response time (msec) Switching Signal ON OFF Model Power source Tightness of Valve (Leak rate) 60 or less DC VX31 40 or less 50 or less AC 40 or less 40 or less DC 50 or less 40 or less AC 50 or less 60 or less DC 60 or less 40 or less AC 50 or less Seal material Fluid Air Liquid

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.