Cylinder with Lock Series MNB

30 30 20 19 37.5 116 20 170 96 1/4 17 26 37 to 750 Bore size (mm) MM J T S U V GF K L Q RR H VA W Z ZZ P GE N 32 M6 x 1.0 34 154 M10 x 1.25 13 6.5 18.3 6 23 37 10.5 47 13 6.5 224 234.5 1/8 88.5 27 40 M6 x 1.0 39.5 161 M14 x 1.5 13 8 19.5 6 23 41.5 11 51 16.5 9 235 246 1/4 96.5 27 50 M8 x 1.25 47 183 M18 x 1.5 17 9 22.4 7 30 47.5 15 58 20 10.5 271 286 1/4 111.2 31.5 63 M8 x 1.25 55.5 197

Magnetically Coupled Rodless Cylinder

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size S 102.5 101.5 45 45 20 20 NB FB 17.5 19 NN Z 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 M5 x 0.8 M4 x 0.7 D GC B F H MM GB GA C A 28 28 NA WW WA WB FC 5.5 5.5 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 29.5 29.5 4 5 M12 x 1.0 6 B Air Cylinder CJ2 10-/1121-/22Head Side Flange Style (G) / CJ2G, CJ2G

HRX-OM-Q026

/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

SVRE 17 SVRE Output ESTOP Note 2) ESTOP Note 2) Load Load Output 18 18 Output ALARM Note 2) ALARM Note 2) Load Load Output 19 19 Output Load Load Output 20 AREA AREA 20 Output FG Round terminal 0.5-5 FG Round terminal 0.5-5 Note 1) For pulse signal wiring method, refer to Pulse Signal Wiring Details.

VXP21/22/23

LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA Connection LVH 3 8 1 2 3 4 03 04 06 10 12 14 20 LVD Refer to the table (2) given below for availability. Thread 1 1 1 2 LVQ 1 4 1 2 Refer to page 17-3-16 for ordering coil only.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: J X = (mm) (mm) Short shaft side Y Y X X Size Size Long shaft side 10 10 1 to 14 1 to 12 1 to 14 1 to 10 Body (B) 15 15 1.5 to 18 1.5 to 15.5 1.5 to 18 1.5 to 11.5 Body (A) Body (B) 20 20 1.5 to 20 1.5 to 17 1.5 to 20 1.5 to 13 Body (A) Y = 30 30 2 to 22 2 to 19 2 to 22 2 to 16 Long shaft side 40 40 4.5 to 30 4.5 to 28 3 to 30 3 to 17 Short shaft side 112 Series CRBU2

HRX-OM-X037

9.4.12 HRL200-W-40 CH1 . 9-17 9.4.13 HRL100/200-W-40 CH2 . 9-18 9.4.14 HRL100-W-40-T2 CH1 . 9-18 HRL Series HRX-OM-X037 Contents 9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

SMC Pneumatic Clean Series

<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5 14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71

•

ZPR10g 10 12 12 21 29.9 46 20 67 25 72 3 17 27 ( ::) 2PR02 26 '-I 26 27 ('J;) \ .2PR08 ZPR13g 13 15 12 21 29.9 46 20 67 25 72 3 1.B ( '2~4' ZPR16g 16 '8 12.5 21 .5 29 30 30.4 46.5 20 67.5 25 72.5 3.5 1.2 ZPR'1O 29 31 29 31 29 31 ZPR13 Deep type (mm) Model A 'B C D E F 1:M5xO.a 1:M6x1 Y' .,G H 1 ZPRl6 31 31 G H ..

7

17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

MU

5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75 Depth

HRX-OM-W060

. 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100A20 CH1 . 8-7 8.4.2 HRL200A20 CH1 . 8-7 8.4.3 HRL300A20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9

High Power Cylinder Series RHC

12 18 12.5 16 10.5 19.5 14 14.5 9 20.5 29.5 30 27 25 25 15 17.5 12 18 12.5 16 10.5 19.5 14 14.5 9 20.5 33 33.5 30.5 32 32 15 19.5 12 20 12.5 18 10.5 21.5 14 16.5 9 22.5 37.5 38 35 40 40 20 24.5 17 25 17.5 23 15.5 26.5 19 21.5 14 27.5 43 43.5 40.5 50 50 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 50.5 50.5 47.5 63 63 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 59 80 80 30.5 16.5

2/3 Port Valve

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47 55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 4 12 Gasket 4 12 Gasket 4 Parts included 13 O-ring 4 13 O-ring 4 13 O-ring 4 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 < External shock absorber type > Description Size 10 20 30 50 P523010-6 P523020-6 P523030-6 P523040-6

7ND9071en

The display starts to blink next position (50 % or 20 %).