Vacuum

5 30.5 16.5 34 24 21-5 81 25,6 23 21,7 1 2 13.5 lnch Slz zFB100-04 ,t8 26 2.5 12.5 21 17,5 t5 50 15.5't4-4 12.4 4 zFB100-06 6 zFB200-06 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 6 15.29-5 zFB200-08 zFB300-08 57 30 27 14.529.5 21 1 7 2t.s 16 I i11 '10 zFB300-10 ifltl Size 80 tw0-G0l0n single ouput digital $wtich [night LE0 dual-output diffial switch Solid State Vacuu m Pressure Switches Specifi

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

13 (12.7) 36.6 35 31.1 29.5 13.3 18 (19) AS23l1FG-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 20 (21) AS23l1FG-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 21 (22) AS23l1FG-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (23) AS33l1FG-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS33l1FG-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS33l1FG

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

Environment

: LEY32A 500 21 to 35 50% to 65% 21 to 35 80% to 95% Force [N] 1 to 4 20% to 85% 400 LEY32 5 to 20 35% to 85% 300 21 to 30 60% to 85% 200 For vertical loads (upward), set the pushing force to the maximum value shown below, and operate at the work load or less. 100 0 10 20 30 40 50 60 70 80 90 Max. 85% Model LEY25 LEY32 LEY25A Lead

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

21.3 18.3 11.7 16 27.5 20.4 9.3 12.7 17 14.3 32.1 31.1 27.1 16.5 18.5 21 16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34 34.4 35.4 29.4 18.5 40.4 17.5 NPT 1/4 36 20 21 Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-60 5 Speed Controller

MHF2

Note 1) Refer to page 21 for solid state switch common specifications. Note 2) Refer to page 21 for lead wire length.

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFL10N-04 KFL12U-02 KFL12U-03 KFL12U-04 KFL12N-02 KFL12N-03 KFL12N-04 10 20.8 27.5 4 2.5 13 15.5 1.5 19.3 1.6 20.5 19.3 27.2 10 13 12 6 4 15.2 21 3 6 12 23.5 30.2 13.7 14 15 13.7 14 15 13.7 16 14.7 16.8 16 14.7 16.8 17 15.7 16.8 17 15.7 16.8 21.3 22.3 21 21.3 22.3 21 23.3 22 25.3 23.3 22 25.3 25.5 24.2 25.3 25.5 24.2 25.3 9.5 28.2 21.5 4 5 11 23.5 30.2 14 12 8 16.2 12 28.2 21.5 5 6 16 30.2

Modular F.R.L. Unit

Note 2) Mounting threads for pressure gauge: AW10: 1/16, AW20 to 30: 1/8, AW40: 1/4.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35

CLS

For details, refer to page 9-9-21.

Compact Cylinder

D-M9m D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

MVGQ

For details, refer to page 10-20-41. 10-16-20

HRX-OM-X071

Required facility water system (for water cooled type) Table 3-2 Facility water source to be prepared Required facility water flow rate Heat Facility water temp. l/min range Model Radiated Facility water temprature oC kW 25 32 35 40 5 to 40 16 19 27 HRR050-W-20(Rating 25) Approx.10 HRR050-W-405 to 35 16 19 22 (Rating 25) HRR Series 3.2 Installation 3-5 HRX-OM-X071 Chapter 3 Transport and

High Power Cylinder:

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

MK

70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345