Profile Design ISO/VDMA Air Cylinder Series CP95

M10x1.25 10 27 16 94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52 38 17 4 6 4 5 10.5 37 179 244 65 46.5 24 5 6 4 9 12 37 194 259 75 56.5

Series VQ Base Mounted Metal Seal/Rubber Seal

(Except for L kit) Note 6) Indicate R for the valve with external pilot.

RHC

51 6 7 16 14.5 10 32 18 8 20 Up to 700 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 25 Up to 700 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 32 Up to 1000 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 40 Up to 1000 WH ZZ P 1/4 S NN ND NF NE K NC JD NB JC NA I N H MM Bore size (mm) 252 192 M22 x 1.5 15.0 13 33.5 5 5.5 30.5 30 43 26 26 22 44 M8 x 1.25 20 1/4 5.8 to 8.8 257 193

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

Environment

6 @3 @2 !0 #4#5 #6 #7 @6 #1 #3 #9 #8 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Part no. l d B H T m H D C B d 32, 40, 50 32 KP-05 NTH-040 20 0.2 6.5 32 12 4.5 M6 x 10L 10 21 25.4 22 M16 x 1.5 6 63, 80 40 KP-08 NTH-050 9 24 0.2 44 18 4.5 M8 x 12L 12 26 31.2 27 M20 x 1.5 9 100 50 KP-10 NTH-060 11.5 26 0.2 44 22 6 M10 x 14L 14 31 37 32 M24 x 1.5 11 B series rod 63 NTH-080 17 40 47.3 41 M30 x 1.5 80 NTH-100 20 54 63.5 55 M39 x 1.5 Double clevis/Double knuckle pin 100

KA

Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 4.3 4.5 5.3 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 39.7 39.7 25.0 25.0 14.9 14.9 6 6 3 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 8 6 23 26.5 28.5 6 6.8 7.5 KAL08-00 10 17 12 10 KAL10-00 KAL12-00 21 Branch tee: KAT Effective area (mm2) Weight (g) Tube O.D. (mm) D L M Q Part No.

CP95

8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51 233 320 114 89 32 5 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L,

CP95

See page 6-13-12 for dimensions. See page 6-13-12 for dimensions.

Speed Controller with Uni One-touch Fitting AS Series

11.0 15.2 18.5 20.9 18.5 21.7 20.8 21.1 22.5 25.3 33.1 23.3 23.9 27.2 35.3 26.4 29.5 31.8 32.8 26.4 29.5 31.8 32.8 33.6 35.2 27.9 28.2 29.6 32.4 40.2 32.5 33.1 36.4 44.5 37.9 41.0 43.3 44.3 37.9 41.0 43.3 44.3 47.9 49.5 17 17 17 19 21 32 32 34 36 53 55 57 59 53 55 57 59 94 95 14.5 AS-FE 14.3 1 8 14.2 36.1 31.1 30.5 25.5 15.5 18.5 21 14.5 15.5 18.5 21 17 18.5 21 22 17 18.5 21 22 21 22 12

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

MHF2

Description Contents MHF2-16D2 MHF2-16D1 MHF2-16D 20, 21, 22 MHF16-PS MHF16-PS MHF16-PS Seal kit 3, 4, 5, 6, 14, 16,19 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit No.

RQ

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 7-7-5 5 Series RQ Weight Basic Weight Additional Weight (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196 50 14 6 53 32 243 373 348 393

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

Antistatic One-touch Fittings Series KA

Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 4.3 4.5 5.3 18.5 21 22 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 39.7 39.7 25.0 25.0 14.9 14.9 7 6 3 8 6 KAL08-00 6 6.8 7.5 23 26.5 28.5 11 17 12 10 KAL10-00 KAL12-00 21 Branch Tee: KAT Effective orifice (mm 2) Weight (g) Applicable tube O.D. (mm) Q L M D Part No.

44

H1 H2 12 8 12 32.6 29 5 11 16 KQB2 14 17 10 14 14 17 36.6 40.4 32.2 35.8 5.8 6.6 13 15 25 43 69 68 71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

NCA1

6 MF5 w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

Air Cylinder NCA1 Series

w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

side 55 75 n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, 35+30(n2) n=2, 3, 4, 80+30(n2) Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 80 75 90 10 1 Dif. sides Be sure to read before handling.