Large blow and

bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Stroke adjusting unit Without adjusting unit Shock absorber + Adjusting bolt Nil H Shock absorber for stroke adjusting unit 25 RB1412 32 RB2015 40 RB2015 Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

3

Through-hole/Both ends tapped common (Basic) S T R Q H (Rod size) AE (Rc, NPT, G) (2 locations) (Port size) E effective thread depth F Yh9 Z X 5.5 (The dimension on the opposite side is the same.) I (4 locations) 0.1 0.2 D G W AC (4 locations) (The dimension on the opposite side is the same.) A AA C J L L J K (4 locations) Flat washer With 4 pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Jointed Rodless Cylinder with Brake Hy-rodless Cylinder Stroke Adjusting Unit CL CL1 MLGC CNG MNB CNA CNS EA EB EC ED EF EY S T EH EI TT h i Part no.

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

S Couplers Series KKH

Dimensions/Socket (S) Male thread type A2 A1 T D H L1 L2 (mm) A1 A2 Effective area mm L2 Body size H Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 17-5-51 10 Series LVD Dimensions Basic type A D L K 4-M (Q) 2-P one-touch fitting Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Breathing port PB H C PA G

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

2 Meter-out type Meter-in type 638 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Dimensions: Elbow Type Seal method: Gasket seal For Uni thread Indicator window direction: 0 Indicator window direction: 180 W1 X W2 Y D3 AS-F AS-F Applicable tubing O.D. d TMH ASD AS L3 A L4 D1 AS-FE KE AS-FG L2 L1 M1 AS-FP H (Width across flats) T AS-FM Metric Size [mm] Model d T H

Low Profile Guide Type

head plug) (Piping port) EY HA GB EH KC CY3B CY3R KH H GB GA HB N G N A GA KW CY1S GD GC Z + Stroke Adjustment bolt CY1L CY1H Model Standard stroke EB A EA EH ES EW EY G GA GB GC GD H HA HB HW CY1F10 49 10 16 7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F CY1F CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13

Bag Filter

G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

CEx-OMG0106

Measures should be taken to prevent drop of hanging or lifing equipment. h. Place where static electricity is discharged or condition that the products have electrostatic discharge. i. Place where strong high frequency is gene-rated. j. Place where damages of thunder are expected. k. Place where vibration or impact is directly 6.

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Low torque Metal seal type Rotary joint

Name Material Remarks 1 Body Aluminum 2 Adapter plate Aluminum 3 Spool Special stainless steel 4 Sleeve Special stainless steel 5 Gasket H-NBR 6 Flange Aluminum 7 O-ring H-NBR 8 Spring pin Carbon steel 9 Bolt Carbon steel Not in 2 circuit model 10 Bolt Carbon steel 11 Retaining ring Carbon steel 12 Radial bearing Allowable leakage according to differential pressure 6000 MQR12 Port-to-port

FQ1

Removing liquid . 45 seconds Removing the case Replacing the element . 51 seconds Installing the case Air vent G1/4 Cover (SUS304) S.O.E. (Single Open Element) can be installed. (for made to order products) INLET OUTLET Case holding mechanism Facilitates element replacement. V-band (SUS304) V-band holding mechanism Facilitates V-band fastening.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Removing liquid . 45 seconds Removing the case Replacing the element . 51 seconds Installing the case Air vent G1/4 Cover (SUS304) S.O.E. (Single Open Element) can be installed. (for made to order products) INLET OUTLET Case holding mechanism Facilitates element replacement. V-band (SUS304) V-band holding mechanism Facilitates V-band fastening.

Fitting Type: H (Connector), Metric Size, Side A: 51 (Tube O.D. 1/2", Tubing Size mm 19x16), Inch Size, Side A: No (Select Metric Size, Side A), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female)

Fitting Type: H (Connector), Metric Size, Side A: 51 (Tube O.D. 1/2", Tubing Size mm 19x16), Inch Size, Side A: No (Select Metric Size, Side A), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: H (Connector), Metric Size, Side A: 51 (Tube O.D. 1/2", Tubing Size mm 19x16), Inch Size, Side A: No (Select Metric Size, Side A), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)