ZCUK

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

Smooth Vent Valve

02S) 41 0.2MPa~10 Pa 0.4~0.7MPa 5~60C IN 11 MADE IN JAPAN 32 32 60 2 x M5 x 0.8, thread depth 5 18 18 524 Smooth Vent Valve XVD Series Construction/Operation Main air supply scale plate !

IDX-OM-W011

2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2

AS-FPQ/FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

3 w q e !5 !0 !1 !

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

2 !3 14A 14B !5 !

PSxx-OMP0001E

Mass 5 g (Excluding lead wire) Hys.

Series DXT474

Side Thread Type Nil Rc G NPT NPTF T F F 1 2 3 4 N.O. N.C. N.O. N.C. N.O. N.C. N.C. N.O. Manifold Type 1 0 Side Ported Top Ported Rated Voltage, Elec.

NARM Series

14 Valve O-ring NBR 1 O-ring Bracket A P3 P5 7 2 O-ring NBR Bracket ass'y Bracket 136312 136412 2 1 set 2 Bracket B Hexagon socket head cap screw 28 X 25 X 1.5 35 X 31 X 2 8 15 O-ring NBR How to Order (1) When adding n stations to ARM : Regulator n pcs.

PSE530/200

Specifications Model PSE530-M5 PSE531-M5 101 to 101 kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa Proof pressure 1.5 MPa 500kPa Air/Non-corrosive gas Fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption 15 mA or less Output specification Analog output (1 to 5 V, Output impedance: Approx. 1 k) Accuracy 2% F .S. or less (Within

IDX-OM-W023

(1) (2) IDU Series 6-2 GWP 6 3 IDX-OM-W023 6 6-3 A B E D Q Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F 10 (10) (820) J H K P L N M 4x13 [AC200V] 17) [AC200V] [AC100V] [AC100V] Guige 17 Guige mm A B C D E F G H J K L M N P Q 859 IDU8E Rc3/4 270 485 31 902 365 1302 230 42 3002 80 3001 328 15 IDU11E Rc3/4 909 14 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Table of Contents - Tubing

I.D. 435 4 6 8 10 12 TFU0425-2-Length per roll-10-X4 TFU0604-2-Length per roll-10-X4 TFU0805-2-Length per roll-10-X4 TFU1065-2-Length per roll-10-X4 TFU1208-2-Length per roll-10-X4 2 to 8 2 to 8 2 to 6 2 to 3 2 to 3 2.5 4 5 6.5 8 290 Max. operating pressure 145 0 4 32 68 104 140 W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) Operating temperature F Reel

IDX-OM-W014

6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDU Series 6-2 GWP 6 2 IDX-OM-W014 6 6-3 Q E D A B P G [AC200V] C F J M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402

Quick Exhaust Valve Series AQ

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

Sine Rodless Cylinder Series REA

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2