Industrial Filters

FGDT/F(L250) Replacement case assembly FGDT/F(L500) FGDC/E(L250) FGDC/E(L500) 25 A FGD Series Dimensions FGDA (1 element) FGDB (2 elements) 108 108 2 x Rc 2 x Rc AIR VENT M6 AIR VENT M6 OUT IN OUT IN B A FGDT FGDF B A DRAIN DRAIN G1/4 G1/4 Element removal dimension: 50 mm (mm) A B Model Element length Port size Rc 314 346 A (L250) FGDC FGDE 574 606 B (L500) 3/8, 1/2, 3/4 314 349 A (L250)

Thermo-chiller/Rack Mount Type

4 i !5 !9 !6 !7 @0 @1 !8 No.

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

HRX-OM-W002

The factory default pump output setting is 90%. 4.2 Starting and Stopping HRR Series 4-2 HRX-OM-W002 Chapter 4 Starting the Product ECO F RUN Lighting up MPa ALM RUN PSI MPa ALM WRN LPM GPM WRN LPM RUN M RMT RMT H H SEC EXT SEC AT MENU RUN/ STOP MENU RUN/ STOP ENT RESET Press and hold for approximately 1second.

KJ

Barb fitting for soft tubing M-01AU-4 Hose elbow (H) M-5HLH-4 4/2.5 x M5 4/2.5 x R For soft nylon and polyurethane tubing M-5P 1 8 R P. 59 1 8 6/4 x M5 6/4 x R Gasket M-01AU-6 P. 56 M-5HLH-6 P. 58 1 8 To seal M5 thread Material: PVC M-5G1 Hose nipple M-01H-4 Elbow For nylon, soft nylon and polyurethane tubing 4/2.5 x R P. 59 1 8 M-5AL-6 M-5ALH-6 M-5HL-4, 6 M-5HLH-4, 6 Gasket (H) One-sided

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Basic style: MGGB 20 to 50 4-F through, counterbore G Bottom 4-H M N HR HN (MAX.)

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375 43 108 Series CHAW Dimensions Foot type: CHAWL H + Stroke H K F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

Vacuum Unit

W With exhaust interference prevention valve Exhaust interference prevention valve 4 When more than one option is selected, list the option symbols in alphabetical order. (Example -BW) 5 When F or H is selected for q and L is selected for the option, the space for adjusting the needle is reduced.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

HRX-OM-X071

ECO F RUN MPa RUN MPa ALM ALM PSI Flash WRN WRN LPM LPM GPM RMT RUN M H RMT SEC H EXT SEC AT MENU RUN/ STOP MENU RUN/ ENT STOP RESET Press and hold for approximately 5 second. SEL RESET Fig 4-4 Restart operation when an alarm occurs *The time to run the pump can be set within the range of "0 to 9 seconds". The factory setting is "0 seconds".

PF2A/PF2W

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

C95

R GL WB C85 GL 1 T BG 4 x RT 4 x RT C76 VA I9 VD V H1 VB BG H1 Q GF GE CG1 I12 F AM I12 AM BN 2 G WH 18 H + Stroke H + Stroke ZY + Stroke MB MB1 CP95 C95 C92 Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42 53 35 8-8-14 14 Precision Air Slide Table Series MXP Dimensions: MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 MX 7 4 H 2.3 11.2 3 MTS 1 MY 1 0.05 D B 9.5 3.5 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E F 50 201.5 56 160 4 20 100 251.5 106 210 4 35 150 301.5 156 260 4 35 200 351.5 206 310 6 2 240 35 250 401.5 256 360 6 2 240 35 300 451.5 306 410 8 3 360 35 350 501.5 356 460 8 3 360 35 400 551.5 406 510 8 3 360 35 450 601.5 456 560 10 4 480 35 500 651.5 506 610 10 4 480 35 550 701.5 556 660 12 5 600 35 600 751.5 606 710 12