High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

ZISE30A.eng

Pressure Setting Item Default setting [F 3] Setting of response time 2.5 ms Measurement mode The power is supplied [F 4] Setting of display resolution 1000-split Safety Instructions [F 5] Setting of auto-preset Manual The measurement mode is the condition where the pressure is detected and indicated, and the switch function is operating.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.

Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.