SMC Corporation of America
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With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Performance/Specifications General specifications LC5-1-T1-02 Part no.

Number No. r t y u i SS070A 01 1A O-ring FKM SS070A-80A-1 10 VFN Port size Clip Stainless steel SS070A-80A-2 10 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel SS070A-80A-4 10 Mounting bracket Stainless steel SS070A-80A-5 10 < U Side End Plate Assembly > w U side end plate assembly no.

Large effective area Low power consumption AVL2000-*02 1/4 67 111 31 55 40 64 (Max. 73) Manual/Manual solenoid lock out Modular design AVL2000-*02-*DZM 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL3000-*03 3/8 76 118 36 57 48 64 (Max. 73) How to Order AVL3000-*03-*DZM 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL4000-*04 1/2 98 133 47 61 52 64 (Max. 73) G 20 00 F DZM R 5 02 AVL AVL4000

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0 0 0 0 0.020.2MPa 1 1 1 1 0.020.4MPa Set pressure range 2 2 2 2 0.020.8MPa 1 + 0 0 0 0 Bottom exhaust Exhaust direction 1 1 1 1 Front exhaust 2 2 2 2 Rear exhaust 2 + Nil Nil Nil Nil Rc Pipe thread type N N N N NPT F F F F G 3 + 02 02 02 02 1/4 Port size

(Note 4)The F .S. means the condition at the maximum setting pressure of the product. (F .S. 0.8MPa, IR2120) (Note 5) Repeatability: This is the reproducibility of the downstream pressure at every operation (ON/OFF) on the downstream side.

Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98

Mat<. 1o/o 13-18.5 (1A F S.) lor Voltage Fluct. Max. +1 0olo (1A F.S.) Max. +1% against DC22-26V (1A F.S.) :urrent itabllity tor Temp. Fluct. Max. +1% @ 79'F (25'C) (1A F S.) Mat<. +2Vo @ 79'F (25"C) (1A F.S.) )perating Temp.

Fluct. l\,lax. +1% @ 79'F (25'C) {1A F.S.) Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

10 8.5 6.5 7.5 24 10 M5 x 0.8 M14 x 1.0 M5 x 0.8 19.5 4 43.5 Built-in magnet: CDJP2B6 to 16 Z + Stroke S + Stroke H A' F GB GA 2 x P A F' Mounting nut Width across flats B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10

NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40 N NE NA NB NF ND NN P S WH

Contact SMC when disassembly is required. 14 Wear ring Resin CX 15 Cylinder tube gasket NBR 16 Rod seal NBR MQ RHC RZQ D-X Individual -X 1205 Series RHC Dimensions: Basic Style 20 to 40 2 x Rc P NN GB GA H2 NN H1 MM 2 x NIf8 D NE C 1.5 1.5 Effective thread length 2 x FL AL E E Width across flats KA NF 10 10 N JD A K F N JC NA S + Stroke F H WH B ZZ + Stroke (mm) A AL B C D E F GA GB H H1

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

(mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36 2 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400

Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting the following formula. f = k x v f: Frequency of vortex v: Flow velocity k: Proportional constant (determined by the vortex generator's dimensions and shape). Therefore, the flow rate can be measured by detecting this frequency.

Nil N F Rc NPT G Lead wire (Refer to page 35.)