11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8

Clean Regulator/Fluororesin Type

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Compact Cylinder with Air Cushion Series RQ

U Q F 2 x 4-OB depth of counter bore RB I 22 M E Z D 11 Minimum bending radius for lead wire 10 Auto switch D-A7/A8 K L B + Stroke M E S A + Stroke J 2-cushion needle Rod end male threads H1 C1 L1 X Rod end nut Auto switch D-A9/F9 Rod end male threads mm Bore size (mm) C1 X H1 L1 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Standard type mm A B C D E F

ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 1.5 2 x M4 DIN rail clamp screw 9 e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported 4 4 4 4 4 4 4 4 3 R 7.5 13.1 29.6 (49.4) P 1 2 2 2 2 2 2 2 2 81.5 66.9 P=11.5 One-touch fitting, thread piping

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

High Pressure Coolant Valve

0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

q e e Figure 2 Backflow Figure 1 Normal When the inlet pressure is higher than the set pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

2 q q AS y !3 w y t AS-FE w i t KE o AS-FG AS-FG i !0 u AS-FP !0 o e AS-FM !4 u Meter-in type Meter-out type AS-D e Seal method: Face seal For G thread AS-T Meter-in type Meter-out type ASP !1 ASN r !2 AQ q w ASV y t AK i VCHC o ASR ASQ !0 u !5 e Meter-out type Meter-in type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

AMH850 is aluminum casting. w e Sight glass Tempered glass Replacement Parts AMH450 Part No. No.

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Fluid: Air (pressurized) Measured pressure: Downstream release to atmosphere 0.01 0.005 Supply pressure (MPa) AMJ5000 0.001 AMJ4000 0.0005 AMJ3000 100 10 50 0.0001 500 1000 Air flow rate (l/min (ANR)) Construction q q OUT IN IN OUT t w r w e r e Component

asilltr

'/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

Speed Controller: Standard Type Series AS In-line Type 1

Description Material q w e r No. Description Material Note o !0 !1 !2 NBR Brass Brass Steel O-ring Body Needle Lock nut Nipple Zinc alloy Stainless steel Brass Stainless steel Needle guide Electroless nickel plated Electroless nickel plated Black oxidized coated Handle E type snap ring Electroless nickel plated Replacement Parts No.

PF2A/PF2W

Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Component Parts Material ADC NBR PBT Stainless steel PBT PBT No. q w e r t y Description Attachment Seal Spacer Mesh Body Sensor Flow direction Operating Unit Descriptions Connectors Connectors shown below are applicable (female contact).

3 Port Solenoid Valve Metal Seal Series VZ200 1

Stainless steel Aluminum die-casted Material Note q Description No. NBR Stainless steel Material Note r Description Spool/Sleeve Body Platinum silver O-ring Return spring w e t y Piston Polyacetal Seal u NBR O-ring i NBR O-ring o NBR Mini Y seal !0 Carbon steel Round head combination screw NBR NBR O-ring !1 Carbon steel Round head combination screw !2 !