Clean Regulator

R Specification Set pressure Gauge port 0 1 IRV 0.02 to 0.2 MPa 0.05 to 0.7 MPa OUT IN VEX Relief mechanism There is only one gauge port. 0 1 Non-relief Relief SRH SRH Made to Order Refer to pages 864 to 866 for details.

AS

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad assembly ZL ZH ZH Pad Locking status: Acceptable e ZH -X267 q Lock plate w Lock screw r Stud assembly Unlocked ZHP ZHP Adhesion q Remove the lock screw. w Push the lever (on the ejector side) of the lock plate to slide it to a position where it stops completely. e Pull out the pad assembly. r Pull out the stud assembly from the pad assembly. t Remove the holder. y Remove the plate from

MU

3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller, One Touch, FLOW CONTROL, 10 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 14 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 14 lb

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: R (w/Bracket

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: R (w/Bracket), Calibration

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature: °C, Bracket: R (w/Bracket), Calibration

: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

°C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: R (w/Bracket

: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: R (w/Bracket

R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: R (w/Bracket

°C), Bracket: R (w/Bracket), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)