Body Size: 50, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 06 (3/4), Float Type Auto Drain: C [N.C.

ZB-OM00301

PVPD 00 1 2 PVPD 03 0.3 0.35MPa 0.4MPa PVPD 04 0.4 0.35MPa 0.45MPa 3 05 0.5 0.35MPa 2) PV 06 0.6 0.5MPa 1) PD 3 0 1 PVPD PVPD PVPD PVPD K1 N.C. N.C. 2 J1 N.C. M5 Q1 +COM N.C.

Air Cylinder NCQ7 Series Compact Cylinder

. _ A+Stroke *and Thru Diameter places 106 111Ae\ :;:50. nry\.. 06 {r 1/16 150 (1Y,') dimensions lor mounting holes same as'A'type on page 11.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Water-cooledThermo-chiller

In order to prevent a sudden product failure of the unit, replace the replacement parts every 36 months. 2. Perform an inspection of the circulating fluid every 3 months. 1. In the case of fluorinated fluids: Discharge the circulating liquid and avoid any dirty objects, or water moisture, or foreign objects entering the system. 2.

Body Size: 50, Thread: N (NPT), Port: 06 (3/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 50, Thread: N (NPT), Port: 06 (3/4), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 50, Thread: N (NPT), Port: 06 (3/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: WZ (W + Z)

Body Size: 50, Thread: N (NPT), Port: 06 (3/4), Option: DE (D + E), Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 50, Thread: N (NPT), Port: 06 (3/4), Option: G (Round Pressure Gauge w/Limit Indicator), Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: WZ (W + Z)

Body Size: 40, Thread: N (NPT), Port: 06 (3/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 40, Thread: N (NPT), Port: 06 (3/4), Option: C [Float Type Auto Drain (N.C.)], Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 40, Thread: N (NPT), Port: 06 (3/4), Option: CG (C + G), Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 40, Thread: N (NPT), Port: 06 (3/4), Option: E [Square embedded type pressure gauge (with limit indicator)], Attachment: Standard, Semi-Standard 1: 36 (3 + 6), Semi-Standard 2: RWZ (R + W + Z)

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Manifold Specifications

(Example) VV5Z3-45FD-06-C6C1 pc. (Manifold base) VZ3143-5FZ2 pcs. (Valve) VZ3243-5FZ3 pcs. (Valve) VZ3000-69-1A 1 pc. (Blanking plate assembly) VQ7 EVS The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: N (NPT), Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 36 (Copper Extension Nozzle 100mm Length, VMG1-06-200-100), Nozzle Cover: C (Nozzle Cover/HNBR)

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: Rc, Connection Size: H06 (Metric Size One-touch Fitting, ø6), Nozzle: 36 (Copper Extension Nozzle 100mm Length, VMG1-06-200-100)