0.01

Dimensions SFD100 different diameters SFD200 different diameters One-touch fitting dimensions(A, B) One-touch fitting dimensions(A, B) Port size q Port size w Port size q Port size w 4 8 4.5 5.5 SMC 6 10 Basic dimension 114.5 Basic dimension 72 5.5 4.5 Fitting dimension A Fitting dimension B Fitting dimension A Fitting dimension B 8 12 5.5 5 Total length 81 (A + 72 + B) 76.5 (72 + A) 81.5

Wireless System

A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) *

SMC Electronic Switch Series Variations

q Supply the vacuum and electrical power source to the unit.

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Vacuum Equipment

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

1

B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 7, Voltage: 24 V DC, Sealing materials

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 15, Voltage: 24 V DC, Sealing materials

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 11, Voltage: 24 V DC, Sealing materials

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 10, Voltage: 24 V DC,

Compatible Fluid: Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 10, Voltage: 24 V DC, Sealing

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Open, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 10, Voltage: 24 V DC, Sealing

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 15, Voltage: 24 V DC,

Compatible Fluid: Air / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Open, Body Material: Aluminum, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 15, Voltage: 24 V DC, Sealing

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 7.1, Voltage: 24 V DC, Sealing materials: NBR, Option:

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 7.1, Voltage: 24 V DC, Sealing materials: FKM, Option:

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 3.9, Voltage: 24 V DC, Sealing materials: FKM, Option:

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 8, Voltage: 24 V DC, Sealing materials: NBR, Option: 2

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 8, Voltage: 24 V DC, Sealing materials: FKM, Option: 2