VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note

Swivels

Compact design to fit into tight areas. 5 0 40 35 30 0 5 20 10 15 25 45 Flow in USGPM Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-27 How To Order S Series Swivels Port 1 Port 2 Shaft O-Ring O-Ring Back-Up Ring Flow Holes Housing O-Ring Back-Up Ring O-Ring Retaining Ring Retainer D Swivels S Part Number: S 21 02 V 8 8 NI Material and Finish

REC

20 100V CE1 PLC D-C73C 5 to 40 24V DC AC DC CE2 D-C80C IC circuit, Relay, PLC 50 24Vor less D-B53,A33 5 to 50 24V DC PLC ML2B 5 to 50 24V DC D-B54 D-A34 D-A44 5 to 25 100V AC ML1C 5 to 12.5 200V AC AC DC 50 Relay, PLC 24Vor less REA D-B64 25 100V AC 12.5 200V AC REC 5 to 40 2 color** D-B59W 24V DC RHC * Use contact protection box when using "D-C7" or "D-C8" type in the following conditions

Compact Electric Actuator Series LG1

hole 5 5 5 5 120 130 5 5 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 7 8 9 10 Pin No. 11 12 13 14 15 16 17 19 20 Signal name Digital output power supply Failure Positioning completion Z phase pulse Symbol V+ ALM PF OP SG NP NG PP PG Signal name Shield Driver model MR-C10A MR-C10A1 Symbol SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

HRX-OM-W032

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Applicable load Type Load voltage Auto switch model Band mounting DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Lead wire length (m) Wiring (Output) Electrical entry Indicator light M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 2) Auto switches marked with are produced upon receipt of order.

VQ5000

SOL.B VQZ100-47-B Note) It can be used with all voltages. 2-6-3 4 Series VQ5000 Base mounted Base Mounted Plug-in/Plug Lead: Single Unit Model Response time (ms) Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0

Filter Regulator IW Series

Thread type Nil Rc N NPT* * Semi-standard Suffix Low temperature (30 to 60C) High temperature* (10 to 100C) External parts copper-free Nil T V L V S V ST V V SL V V * With pressure gauge type: Max. 80C.

PSxx-OMG0005CN

5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)) A A PSE200/PSE300 (ZS-28-C) 3M 37104-3101-000FL 1473562-4 XN2A-1430 PSE200 PSE300 -9No.PS-OMG0005CN-E DC+ OUT PSE5615V 1 k DCLINE+ PSE56--28 420 mA 500 (24 V ) 100 (12 V ) LINELINE(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E

Low Maintenance Filter Series FN1

Contact P/A regarding the valves 3 to 5.

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 Y R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 9 7 . 1 ) 5 . 5 4 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 3 0 . 2 ) 5 . 1 5 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 Y R K 2 3 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 8 / 3 S 6 3 1 1 Y R K 4 2 . 1 ) 5 . 1 3 ( 9 0 . 2 ) 3 5 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 Y R K 0 4 . 1 ) 5 . 5 3 ( 9 1 . 2 ) 5 . 5 5

VM

VH Twist selector (3 position) VM230-02-35R/B/G/Y VM250-02-35R/B/G/Y Panel mounting hole VHS JIS Symbol 2 port EXH port 5 port EXH port (5 port only) (5 port only) 0.5 MPa supply 40 N F.O.F. 45 T.T.

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 5 (24 VDC), Electrical Entry: L Plug Connector, Blanking Plate: B1 (1 set)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 24 VDC, Electrical Entry: L Plug Connector, Blanking Plate: 1 set, CE-compliant: -

ISA2

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

0.01

Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11