Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: CE Marked

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: CE Marked

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

4-channel Flow Monitor ( compatible)

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

AMP

CAT.ES13-7 A Exhaust Cleaner for Clean Rooms Series AMP An exhaust cleaner that can be used inside a clean room. Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the operating conditions.)

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

AMPSeries

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Steam Valve

) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 637 A VND Series Port size: 32A, 40A

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Related Products: Strainer At the terminal of an air pressure line in which a D.P. Lube is used, install a strainer (filtration rate of 5 m) upstream with a metal seal solenoid valve, which is susceptible to dust. Float switch mounting position Mounting orientation is upward.

VND

LQ 0.6 VND1 LVN 1 (A) 2 (B) 1 (A) 2 (B) 0.5 Pilot pressure (MPa) TI/ TIL 0.4 12 (P1) 10 (P2) PA 0.3 A 2 3 4 5 6 7 0.2 PAX VND 1 (A) 2 (B) 1 (A) 2 (B) 0.1 PB 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 0 1 0.1 Operating pressure (MPa) 17-4-39 4 Series VND Port size 6A, 8A, 10A (Valve open) Pilot port Indicator (Option) (Back side P2) Main port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Exhaust Cleaner for Clean Rooms AMP Series

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

Cylinder Positioner IP200 Series

In addition to an air filter (SMC AF series), it is recommended to use a mist separator (SMC AM, AFM series) and a micro mist separator (SMC AMD, AFD series). Also, refer to SMC Air Preparation System for air quality. IS VFN INT 2. Never use a lubricator, as this can cause a malfunction (*1). 3.

IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Stations: 4 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 5 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

Stations: 7 Stations, Piping: P Common, R Individual, A Side, Thread: -, Option: -, CE/UKCA Compliant: -