Option: SKAN (Fieldbus Type, Negative Common, I/O Link), Lead Wire: None, Stations: 14 Stations, SUP/EXH Block: B (Both Sides, 2 to 16 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping), Mounting: L (Mounting Leg, 90mm)

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 10 (10m), Stations: 2 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping)

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 10 (10m), Stations: 6 Stations, SUP/EXH Block: B (Both Sides, 2 to 16 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping), Mounting: L (Mounting Leg, 90mm)

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 10 (10m), Stations: 8 Stations, SUP/EXH Block: B (Both Sides, 2 to 16 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: 02F (G1/4)

This is a legacy product, and replaced byVFS2430-5YOB-02F

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 10 (10m), Stations: 3 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping)

Option: L1 (Lead Wire, 34 Cores), Lead Wire: 15 (15m), Stations: 2 Stations, SUP/EXH Block: D (D Side, 2 to 10 Stations), Pilot Type: Internal Pilot, Port Size: 02F (w/o Fitting; A,B Port: G1/4 Thread Piping)

Manifold Type: 42 (Base Mounted), Valve Stations: 7 Stations, A, B Port: 02F (G1/4)

Manifold Type: 42 (Base Mounted), Valve Stations: 4 Stations, A, B Port: 02F (G1/4)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103

Rotary Actuator/Vane Type

When tightening the screw, take care that the auto switch does not tilt. 103 CRBm2 Series Auto Switch Mounting: Size 10, 15 (D-S/T99(V)m, S9P(V), 97/93A, 90/90A) External view and descriptions of auto switch unit This following shows the external view and typical descriptions of the auto switch unit.

CV/MVGQ

M22 x 1.5 M26 x 1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103

New

Fluid 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa 1) Type of fluid Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side. Also, install a filter on the primary side, and be careful that no foreign material is picked up.

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

MY1

115 175 200 G 23.5 25 60 70 LW 80 96 112 140 GB 37 39 71.5 79.5 HG 40 51 66 85 H 94 116 150 190 JJ M6 x 1 M8 x 1.25 J M12 x 1.75 M14 x 2 Model MY1B 50 MY1B 63 MY1B 80 MY1B100 PB 50 60 65 85 PE 240 280 M 14 16 20 25 PC 100 115 PF 22 42 PA 120 140 80 120 PD 8.5 9.5 N 47 50 85 95 Q 384 440 660 760 NC 38 51 65 85 QW 76 92 90 120 NE 76.5 100 124 157 Z 400 460 690 800 NG 51 59 82 103

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103

CV/MVGQ

1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) 40 50 63 80 100 With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke f 11.2 11.2 11.2 12.5 14.0 h 59 66 66 80 81 ZZ 229 239 247 280 292 Z 101 111 115 138 144 Z 93 103