Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

of the items below, where the total (n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max MX Note Item Review m. m max is the maximum load mass.

CYV

of the items below, where the total (n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max Note Item Review m. m max is the maximum load mass. 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

of the items below, where the total (n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max Note Item Review m. m max is the maximum load mass. 1.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

•

I } n , . . ' , "i C1.. 4.5 I~ _ ' : , r Auto switch ."

Table of Contents

0.042 0.17 0.33 1.1 1.9 2.9 0.037 0.15 0.29 1.0 1.7 2.6 0.033 0.14 0.26 0.92 1.6 2.4 0.059 0.26 0.81 1.8 3.0 4.3 0.052 0.24 0.74 1.6 2.7 4.0 0.047 0.22 0.69 1.5 2.6 3.8 0.85 1.4 2.2 0.78 1.3 2.1 0.73 1.2 2.0 0.68 1.2 1.8 0.17 0.59 1.1 3.9 5.7 8.5 0.15 0.54 1.0 3.6 5.3 7.9 0.14 0.56 1.1 3.8 5.7 8.6 With auto switch: CDUK-D With auto switch: CDUK-S With auto switch: CDUK-T (N) (N) (N) Model

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

of the items below, where the total (n) does not exceed 1.

VQ5000

L n Dimensions 11 527 547 L1 L2 10 486 506 9 445 465 8 404 424 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 12 568 588 2-6-17 Base Mounted 18 Series VQ5000 Kit (Individual terminal block kit) T1 Manifold Specifications When the junction cover on the manifold is opened, terminal box is installed in the manifold block.

CRJ

Fs(a) Fs(b) Allowable thrust load (N) Allowable radial load Fr (N) Size Fs(a) Fs(b) 05 1 25 20 20 30 25 25 Features 4 Series CRJ Inertial Moment Formulas I: Inertial moment kgm, m: Load mass kg 1. Thin shaft 6.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Home position switch De-energized operating type 0.1 Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications LC6D-220AD-Q (Refer to page 306 details.) LC6D-507AD-Q (Refer to page 306 for details.) Applicable driver Holding plate: MB1(1 pc.), Phillips countersunk head screw M3 x 6l (1 pc.)

CG5-S

3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

180

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

3 Port Solenoid Valve Series VQ100 1

L N Electrical entry U Option Note) Except latching and large flow type.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

Fs(a) Fs(b) Allowable thrust load (N) Allowable radial load Fr (N) Size Fs(a) Fs(b) 05 1 25 20 20 30 25 25 Features 4 Series CRJ Inertial Moment Formulas I: Inertial moment kgm, m: Load mass kg 1. Thin shaft 6.

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

Compact Guide Cylinder

n Plate material A Aluminum alloy F Carbon steel Auto switch Nil Without auto switch (Built-in magnet) Bearing type M Slide bearing L1 Ball bushing For applicable auto switches, refer to the table below. 1 For bore sizes 16 and 32 only Piping port location Nil Top/Side ported P1 Top ported Bore size 12 12 mm 32 32 mm 16 16 mm 40 40 mm 20 20 mm 50 50 mm 25 25 mm 1 For bore sizes 12 and

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014