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(Tolerance 30%) Hysteresis may fluctuate due to the operating environment. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 10 10 5 5 10 15 Auto Switch Mounting Bracket/Part No.

Doc. no.C96N-OM0198Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number C96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orenge 6 B B-2 Yellow 5 B A-2 1 1.5m Green 3 COM-A / COM B-3 Blue 4 3 3m COM-B / A-3 Shield 5 5m Cable color T erminal no.

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

SI IP65 IP65 M12(5 ) . 9-2 EX245-LA1(A) / (TOP View) 1 L+ 24 V / US1 2 2 I/Q / US1 3 5 1 3 L0 V / US1 4 C/Q IO-Link DI DO / US1 4 5 N.C. 19.6. . 9-3 EX245-LB1(B) / (TOP View) 1 L+ 24 V / US1 2 2 P24 24 V / US2 3 5 1 3 L0 V /US1 4 C/Q IO-Link DI DO / US1 4 5 N24 0 V / US2 19.6. 58 No.EX-OMW0014CN-A 9.4.

S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12) 17.5 6.5 9.6 8.5 17.2 (7.5) (7.5) C8:

5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Product Specifications P. 5 1-1. Cylinder specifications 1-2. Lock specifications 1-3. Stop accuracy 1-4. Precautions on model selection P. 6 2. Installation and Handing P. 10 2-1. Air supply 2-2. Design 2-3. Mounting 2-4. Operating environment 2-5. Speed control 2-6. Cushion 2-7. Directional control 2-8. Pneumatic circuit 2-9. Adjustment and Operation 3. How to use P. 17 3-1.

blow (With clean gas filter) Line D: For N2 blow 60 Change in particle generation with time 40 20 0 1 2 3 4 5 6 7 8 9 10 0 Valve operating cycle x 104 10 Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 8 Line B 6 Line C 4 2 0 0 1 2 3 4 5 6 7 8 9 10 Valve operating cycle x 104 Example of air line equipment Example of oil-free air equipment

DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A CF G1/8 ISA-12-C -11No.PS-OMT0001CN-E 2 ISA-21ISA-20 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 30PSI0.2MPa PSI 2 0.4MPa 0.2MPa 0.4MPa 0.2MPa MPa MPa/PSI 2 11/8 2SI -12No.PS-OMT0001CN-E

Valve side exhaust 493 XMH, XYH Series Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMH-16 XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Model Selection Series CNG Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 100 500 400 300 200 100 0.5 500 400 300 200

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

Set bank 1 input on,2 & 3 off. 2. Set point A input on. 3. Busy output is on while actuator moves. 4. Busy output turns off; point A output turns on. 5. Set point A input otf, and point A output turns otf. 5 First work piece is inspected. 6 Move from present position to next piece (incremeni + 1,000 pursesl. 1. Set bank 1 input on, 2 & 3 off. 2. Sei ooinl B inout on. 3.

Doc. no.C96N-OM0197Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number CP96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.

or less HF: 5% or less HNO3: 5% or less c Hydrofluoric acid and Nitric acid mixture c Nitric acid (except fuming nitric acid) HNO3: 5% or less c Hydrochloric acid HC I: 5% or less 50 to 122F (10 to 50C) Note) HED007 50 to 86F (10 to 30C) p Note 2) Copper sulfate solution H2SO4: 96% or less 50 to 122F (10 to 50C) Note) HED007 50 to 86F (10 to 30C) p Note 2) Sulfuric acid (except fuming sulfuric